Preparation of compounds based on phase equilibria of cu-in-se

ABSTRACT

The present invention relates to the use of phase equilibria as shown in the phase diagram of Cu—In—Se for the preparation of solid compositions. Further, a new method for directly obtaining α CulnSe2 from a liquid phase, preferably as a single phase composition and novel single phase α CulnSe2 compositions are provided.

[0001] The present invention relates to the use of phase equilibria as shown in the phase diagram of Cu—In—Se for the preparation of solid Cu—In—Se phases with defined compositions. In particular, a new method is provided for obtaining single-phase α-CuInSe₂ directly from a liquid phase. Further, the new method allows one to fabricate single phase α-CuInSe₂ with compositions that one could not obtain before.

[0002] Cu—In—Se-compositions, e.g. compounds and alloys, particularly the α-CuInSe phase having the stoichiometry CuInSe₂ are semiconductor materials which are suitable for photovoltaic applications due to their excellent optical and electronical properties. Since CuInSe-compounds transfer light energy into electric energy with high efficiency and additionally absorb visual light very well, these materials are suitable for preparing thin film solar cells, which are superior to conventional silicon solar cells both as to their performance characteristics and lower material consumption and thus can be produced at lower costs. Due to their higher efficiency and weight reduction because of the lower quantity of material present, such solar cells are particularly well suited for the energy supply of space ships and satellites. Theoretically, CuInSe₂ thin film solar cells are said to achieve efficiencies of over 20%. The efficiencies obtained in practice, however, are still below 15% so far. An important aspect for the efficiency is the microstructure of the thin films, i.e. the entirety of the microscopic defects in the material concerned. The microstructure comprises point defects (impurities), dislocations, surface and inner boundaries. The inner boundaries comprise grain boundaries, i.e. boundaries between areas having different orientation of the crystal lattice, and phase boundaries.

[0003] Among the defects mentioned above, extended defects such as grain boundaries and phase boundaries presumably have a particular disadvantageous effect on the photovoltaic properties of the material: Photovoltaically produced charge carriers, i.e. electrons and holes are captured by these defects and recombine with one another thereby generating a photon. Thus, at crystal defects the photovoltaic conversion of energy is reversed and the macroscopically detectable efficiency of the solar cell decreases accordingly. In addition, the presence of additional phases reduces the volume percent of the photovoltaically relevant α-phase, thereby reducing the efficiency even more.

[0004] Accordingly, a particular high efficiency can be achieved by producing an α-copper-indium-selenide without grain boundaries and phase boundaries. Such a monocrystalline material without grain boundaries and phase boundaries is called single crystal.

[0005] Over the recent years there have been intensive attempts of producing a single-crystalline α-copper-indium-selenium. However, the Bridgman techniques applied for this purpose have not been successful. According to current knowledge, the problem is that in the Cu—In—Se system a complex variety of phase equilibria can be generated. For instance, cooling down a liquid phase having the composition CuInSe₂ to room temperature according to the Bridgman method does not result in a single crystal, but in a mixture having several phases of different composition and corresponding phase boundaries. To be able to conceive a method for the production of single crystals a complete and precise ternary phase diagram is required. So far, however, the literature only provides incomplete and/or incorrect phase diagrams of the Cu—In—Se system.

[0006] U.S. Pat. No. 4,652,332 describes a method, wherein stoichiometric amounts of Cu, In and Se are applied. Contrary thereto, the method according to the invention does not start out from the stoichiometric composition. Additionally, the phase diagram included in U.S. Pat. No. 4,652,332 differs from the phase diagram presented herein.

[0007] L. S. Yip et al., Record of the Photovoltaic Specialists Conference, U.S., New York, IEEE, vol. Conf. 21, May 21, 1990, pages 768-771 show in FIG. 3 compositions with which α-CIS-monocrystals were obtained. Upon performing the works of the present invention it was noticed that the breadth of the α phase is much smaller and the monocrystals described in Yip et al. are no thermodynamically stable α-CIS single crystals. Yip et al. mention data, which were obtained by electron probe microanalysis (EPMA). The spacial resolution of this method, however, is only 1 μm (1000 nanometers). When corresponding compositions are examined with transmission electron microscopy, a technique used for obtaining a spacial resolution of 0.3 nm, however, polyphases are detected. The monocrystals described by Yip et al. are thus polyphase crystals having a common crystal orientation, contrary to the single-phase crystals described herein. Further, the crystals described by Yip et al. have a size of only a few millimeters, whereas the method described herein allows for the production of crystals of arbitrary size. Moreover, the Bridgman method of Yip et al. is based on congruent solidification, which means that the solidifying solid particle has the same composition as the melt. A particuliarity of the method according to the invention is that the melt from which the α-CIS single-phase crystals are obtained exhibits a different composition than, α-CIS.

[0008] Z. A. Shukri et al., Journal of Crystal Growth, NL, North-Holland Publishing, Amsterdam, vol. 191, No. 1-2, (1998), pages 97-107 describe a Bridgman method based on concruent solidification. This means that the solidifying solid particle has the same composition as the melt. Contrary thereto the melt, from which α-CIS monocrystals are obtaned in the method according to the invention, exhibits a different composition than α-CIS. Also Shukri et al. show measuring data obtained by electron probe microanalysis (EPMA). The dimensional resolution of this method, however, is only 1 μm (1000 nm). When crystals of corresponding compositions are examined with transmission electron microscopy, a technique for obtaining a dimensional resolution of 0.3 nm, the polyphases of such crystals can be detected.

[0009] Abid et al., Conference Record of the 19th Photovoltaic Specialists Conference 1987, May 1987, pages 1305-1308 also describe α phase diagram of Cu—In—Se, which is incomplete and different to the phase diagram presented herein. The assertion in Abid et al. that monocrystals of the alloy concerned were produced is not supported by experimental data in this work.

[0010] In extensive experimental tests conducted on over 250 different Cu—In—Se alloys for the first time the ternary phase diagram of the Cu—In—Se system was determined completely and at high accuracy with the help of differential-thermal analysis, transmission electron microscopy, scanning electron microscopy, x-ray diffraction and light microscopy. From these phase diagrams now several promising methods for the production of α-single crystals and other interesting compositions can be derived.

[0011] From the ternary phase diagram Cu—In—Se, as shown in the enclosed figures, it becomes evident why α-single crystals cannot be produced according to the Bridgman method. This phase diagram shows that the α-phase is involved in a variety of phase equilibria at temperatures during the cooling phase to room temperature. At about 500° C. there are two-phase equilibria and three-phase equilibria between the α-phase and nine other phases. However, this was not known before our tests have been performed. According to the prior art it was assumed that α-CuInSe₂ can only be generated via solid phase transformation δ_(H)→α. According to our novel ternary phase diagram the α-phase, however, has four different surface areas of primary crystallization—consequently, there are four types of liquid phases, from which CuInSe₂ can be directly obtained and then cooled down to room temperature without further phase transformation.

[0012] Thus, the novel phase diagram of Cu—In—Se including the liquidus surface of the ternary system as described in the accompanying figures provides novel methods for the preparation of solid compositions comprising the elements Cu, In and Se. By means of the phase equilibria in the diagram the direct formation of desired solid compositions, i.e. solid compositions having a desired phase and/or stoichiometry, may be effected from a liquid phase without phase transformation in the solid state. Preferably, the solid compositions are prepared by crystallization from a liquid molten Cu—In—Se phase.

[0013] For example, the preparation of the solid compositions may comprise crystal growth by the Czochralski method without feed of a liquid phase. In this method, a seed crystal is immersed in a melt having a desired composition and temperature and grown by rotation. In a further embodiment, the preparation of the solid composition comprises crystal growth by the Czochralski method including feed of a liquid phase, i.e. during the crystal growth a liquid phase having the same composition or a different composition from the original liquid phase is fed continuously or intermittently into the liquid phase which is used for the crystal growth.

[0014] Alternatively, the preparation of single crystals may comprise crystal growth from a first liquid phase which is in contact with a second liquid phase wherein the density and the stoichiometry of the first liquid phase differs from the density and the stoichiometry of the second liquid phase. While the crystal is grown from the first liquid phase, the second liquid phase supplies the material withdrawn from the first liquid phase by the crystal growth.

[0015] It should be noted, however, that other methods for crystal growth, particularly for the growth of single crystals are suitable for the preparation of particular Cu—In—Se-compositions as can be gathered by the skilled person from the phase diagram as shown in the accompanying figures. For a detailed description of crystallization methods reference is made to Elwell and Scheel, Crystal Growth from High Temperature Solutions, New York: Academic Press (1975), Holden and Morrison, Crystals and Crystal Growing: The MIT Press (1982), Recker and Wallrafen, Synthese, Einkristall{umlaut over (zu)}jchtung und Untersuchung akustooptischer Materialien FbNRW, 2983 (1980), Wilke, Kristallzuchtung (Ed. J. Bohm), Berlin: VEB Deutscher Verlag der Wissenschaften (1988) and references recited therein.

[0016] A particular advantage of the novel Cu—In—Se phase diagram including the liquidus surface of the system is to provide novel methods for preparing compositions from a liquid phase wherein the desired solid composition has a stoichiometry which differs from the stoichiometry of the liquid phase. Without knowledge of the liquidus surface of the system such a method of preparation would not be feasible.

[0017] The phase diagram is particulary suitable for the preparation of alloys that are single phase compositions and/or single crystalline compositions. The preferred direct formation of the desired solid alloy from a liquid phase without solid state transformation results in a composition having advantageous properties compared to prior art compositions which have been subjected to solid state transformations. Alloys obtained by direct formation from a liquid phase have advantageous physicochemical properties compared to alloys that have been obtained via a solid state transformation, e.g. macroscopic homogeneity, lower amounts of defects and inner boundaries. Particularly, alloys obtained by direct precipitation from a liquid phase will not contain any inter-phase interfaces, which also means that they will be free of the internal stresses that usually build up in the presence of such interfaces.

[0018] The phase diagram as shown in the accompanying figures is not restricted to a ternary system consisting of the elements Cu, In and Se, but may be extended to Cu—In—Se alloys doped with at least one further element, particularly Ga, Na, or S, wherein said at least one further element is present with dopant concentrations up to 5 atom percent, preferably up to 2 atom percent and more preferably up to 1 atom percent. The before-mentioned dopants widen the α-phase field, the stoichiometrical range of the α-phase.

[0019] The phase diagram of the present invention allows the preparation of single phase and/or single crystalline alloys in the ternary system Cu, In and Se and extensions thereof comprising at least one further element. More preferably, the compositions are selected from the α-phase, the γ_(T)-phase, the δ_(R)-phase and the δ_(H)-phase. The melt compositions and temperatures for a direct deposition of γ_(T), δ_(R) and δ_(H) from a melt are indicated in FIGS. 6, 43(a), 50 and 51. Most preferably, the composition is the α-phase having the stoichiometry CuInSe₂ within a compositional range as indicated in FIGS. 51 and 52. Doping with Ga, Na or S further extends the compositional range of the α-phase.

[0020] The α-phase may be directly crystallized from a liquid phase under conditions selected from the group of liquidus surfaces of primary crystallization αL1, αL2, αL3 and αL4 as defined in the phase diagram and particularly in Table 4.

[0021] Thus, a further subject matter of the invention is a method for directly obtaining the α-phase from a liquid phase by crystal growth under conditions selected from the group of liquidus surfaces of primary crystallization αL1, αL2, αL3 and αL4. The α-phase may be obtained as a single phase composition, and thus also as a single crystal. Further, it is possible to grow single crystalline α epitaxially on a single crystalline substrate, such as a metal or ceramic substrate.

[0022] Yet a further subject matter of the present invention is a single phas composition, selected from the α-phase, the γ_(T)-phase, the δ_(R)-phase and the δ_(H)-phase, particularly which have been directly obtained from a liquid phase and which have not been subjected to a solid phase transformation. Single crystals of this kind can have a defect concentration as low as the defect concentration in melt-grown single crystals of any other comparable material. Since the solidification of the α-phase from the liquid phase L₁, L₂, L₃ or L₄ can be conducted close to thermodynamic equilibrium (small supercooling), the defect density of the resulting crystals will be very low compared to, for example, material deposited from the vapor phase (physical vapor deposition, PVD) or layers plated from aqueous solutions. Similar to Si crystals grown from the melt, the concentration of extended defects (phase boundaries, grain boundaries, twin boundaries, stacking faults and dislocations), which one can experimentally observe by transmission electron microscopy (TEM), can be near or equal to zero. For the same reason, the concentration of various types of point defect, which one can analyze by capacity methods (admittance spectroscopy, deep level transient spectroscopy) can be as low as the corresponding equilibrium concentration Exp[S/k_(B)T]·Exp[−E/k_(B)T], where S denotes the formation entropy of the respective type of point defect, E the formation energy, k_(B) Boltzmann's constant, and T the temperature in Kelvin. Further, the composition may be a macroscopic single crystal having a size of at least 1 cm³, preferably at least 5 cm³.

[0023] Particularly preferred methods for obtaining α-CuInSe₂ single crystals are described in detail as follows:

[0024] The novel phase diagram shows that α-single crystals with a certain variety of compositions can be generated around the ideal stochiometric composition CuInSe₂ (FIG. 43a-g). This does not work with the Bridgman technique, either: Since the Bridgman technique is bound to congruent solidification of the liquid phase, the single crystals of the δ-phase are always obtained first. As can be gathered from the novel phase diagram, the δ-phas crystallizes via a melting point maximum at 1002° C. thus resulting in the composition Cu_(23.5)In_(26.0)Se_(50.5). Since this composition differs from the ideal composition Cu₂₅In₂₅Se₅₀ of the α-phase, the high temperature phase δ does not completely transform into the α-phase upon further cooling, but decomposes into two phases, α and δ_(R). This can be taken from the quasibinary section In₂Se₃—Cu₂Se (FIG. 6a-d) of the ternary phase diagram.

[0025] Based on this novel ternary phase diagram Cu—In—Se, there are two preferred methods for the production of α-single crystals:

[0026] 1. Czochralski method (including and without feed of a liquid phase)

[0027] 2. Single crystal growth in a monotectic reaction

[0028] For performing these methods the location of the composition ranges of the four above-mentioned liquidus surfaces of primary crystallization of a and their temperature dependency as well as position and temperature of the monotectic reaction must be known. According to the polythermic illustration in FIG. 43a-g the four surfaces of primary crystallization of the α-phase are specified by the parameters indicated in Table 4.

[0029] In order to be able to precisely adjust the composition of the single crystals, the course of the tie lines between the α-phase and the liquid phases L₁-L₄ is provided. Our results prove that the In₂Se₃—Cu₂Se isopleth constitutes a quasibinary section. In quasibinary sections the tie lines are aligned with the section plane. This is an advantage for single crystal growth according to the Czochralski method, since the isopleths immediately disclose the temperature-concentration-range suitable for crystal cultivation. Further, the chemical composition of the liquid phase and the single crystal may be determined and/or adjusted via the tie lines.

[0030] This is now possible due to our results, particularly with the isopleth CuInSe₂—Cu₅₀In₅₀ (FIG. 32) and—correspondingly—with the isopleth CuInSe₂—Cu₇₀In₃₀ (FIG. 31).

[0031] Thus, there are at least three novel methods for producing single crystals from α-copper-indium-selenide using isopleth CuInSe₂—Cu₅₀In₅₀ (FIG. 32):

[0032] 1. The Czochralski method without feed of a liquid phase provides a means for growing the α-phase as single crystal starting from a composition with 41 atom percent (at. %) Se to the monotectic point L₁ (673° C., 33.7 at. % Se).

[0033] 2. The Czochralski method including feed of a liquid phase provides a means for producing single crystals within the concentration range from 33.7 at. % Se to 41 at. % Se at any temperature between 812° C. and 660° C., as the tie lines are aligned with the section plane.

[0034] 3. Furthermore, the isopleth CuInSe₂—C₅₀In₅₀ shows a monotectic reaction, wherein the liquid phase L₁ dissolves at 600° C. into the α-phase and another liquid phase L₂. This liquid phase L₂ is richer in indium than liquid phase L₁ and has therefore a higher density (a higher specific weight). Due to gravitation, the liquid phases L₁ and L₂ are positioned in layers one on top of the other and whereas the single crystal is grown from liquid phase L₁, the liquid phase L₂ below supplies the liquid phase L₁ with further material.

[0035] The isopleth CuInSe₂—Cu₇₀In₃₀ (FIG. 31) provides further possibilities for the production of α-single crystals. This isopleth can be used for producing single crystals of the α-phase according to the three above-mentioned methods between 33.5 at. % Se at 673° C. and 39.6 at. % Se at 805° C.

[0036] Moreover, the isopleth InSe—CuSe (FIGS. 30 and 51) enables the growth of single crystals of the α-phase from the liquid phase L₃ according to both Czchoralski methods. The following data have to taken into consideration: Between 44 at. % Se at 800° C. and 49.5 at. % Se at 605° C. the tie lines are aligned with the section plane and form the boundary between the α-phase and the liquid phase L₃.

[0037] The same is true for isopleth Se—CuInSe₂ (FIG. 45). Between 85 at. % Se at 805° C. and 99.99 at. % at 221° C. the α-phase can be primarily grown from the liquid phase L₄. Hence the preconditions for single crystal growth of α-copper-indium-selenide without phase transformation are fulfilled.

[0038] The invention is further explained by the following figures, tables and examples:

FIGURES

[0039]1. In Examples I and II the In₂Se₃—Cu₂Se isopleth (subsystem I), which constitutes a quasibinary section, and the In—In₂Se₃—Cu₂Se—Cu subsystem (subsystem II) are described. Example III deals with the In₂Se₃—Se—Cu₂Se subsystem (subsystem III). This subsystem is further subdivided into the regions In₂Se₃—Se—CuInSe₂ (IIIa) and Cu₂Se—Se—CuInSe₂ (IIIb).

[0040]2. Equilibrium phase diagram In—Se between 33 and 60 at. % Se.

[0041]3. Diagram comparing metastable phases (solid lines) and stable phases (dotted lines) of the In—Se system.

[0042]3 a. Phase diagram between 30 and 60 at. % Se.

[0043]3 b. Enlarged region of FIG. 3a, indicating the position of thermal effects (open triangles) obtained after re-heating immediately after detecting the last thermal effects of supercooling (filled triangles).

[0044]4. Constellation leading to critical tie lines in the In₂Se₃—Cu₂Se quasibinary section.

[0045]4 a. Eutectic critical tie line.

[0046]4 b. Peritectic critical tie line.

[0047]5. Three-dimensional sketches of critical tie lines in the ternary phase diagram.

[0048]5 a. Eutectic critical tie line.

[0049]5 b. Peritectic critical tie line.

[0050]5 c. Region of homogeneous δ_(R) and the two-phase and three-phase equilibria that bound to δ_(R) at low temperatures.

[0051]6. The isopleth In₂Se₃—Cu₂Se of Cu—In—Se. Our experimental results show that this section actually represents a quasibinary section.

[0052]7. Microstructure of Cu_(46.5)In_(12.2)Se_(41.3) after different heat treatments.

[0053]7 a. 3 h at 935° C.; water quench; SEM 200×.

[0054]7 b. 12 h at 500° C.; water quench; 400×.

[0055]8. Microstructure of Cu_(42.0)In_(50.0)Se_(43.0) after different heat treatments.

[0056]8 a. 5 h at 850° C.; water quench; LM 200×.

[0057]8 b. 5 h at 850° C.; water quench; 1000×.

[0058]9. Microstructure of Cu_(60.0)In_(4.0)Se_(36.0) after 5 h at 850° C.; water quench; SEM 400×.

[0059]10. Microstructure of Cu_(18.0)In_(29.4)Se_(52.6) after 60 h at 500° C., 70 h at 300° C., and 140 h at 100° C.; water quench; SEM 1000×.

[0060]11. Microstructure of Cu_(18.5)In_(28.9)Se_(52.6) after different heat treatments.

[0061]11a. 60 h at 500° C., 70 h at 300° C., and 140 h at 100° C.; water quench; SEM 1000×.

[0062]11 b. After cooling from 900° C. down to room temperature at 5 K/min; SEM 1000×.

[0063]12. Microstructure of Cu_(21.0)In_(27.5)Se_(51.5) after different heat treatments.

[0064]12 a. 12 d at 500° C.; water quench; SEM 2000×.

[0065]12 b. 6 d at 500° C., 6 d at 300° C., and 6 d at 100° C., water quench; SEM 2000×.

[0066]13. Microstructure of Cu_(23.5)In_(26.0)Se_(50.5) after different heat treatments.

[0067]13 a. 12 d at 50° C., water quench; SEM 2000×.

[0068]13 b. 6 d at 500° C., 6 d at 300° C., and 6 d at 100° C.; water quench; SEM 2000×.

[0069]14. Phase diagrams In₂Se₃—Cu₂Se between 15 and 30 at. % Cu.

[0070]14 a. Equilibrium phase diagram.

[0071]14 b. Metastable phase diagram for solid solutions water-quenched to room temperature from 850° C.

[0072]15. Microstructure of Cu_(26.0)In_(24.2)Se_(49.8) after 12 h at 850° C.; water quench; TEM 220 000×. Bright regions consist of α-CuInSe₂, dark regions of (CuIn)₂Se.

[0073]16. Isothermal section of the Cu—In—Se equilibrium phase diagram.

[0074]16 a. Isothermal section at 500° C.

[0075]16 b. Enlarged section of FIG. 16a.

[0076]17. Microstructure of Cu_(10.0)In_(44.0)Se_(46.0) after 20 d at 500° C.; water quench; SEM 400×.

[0077]18. Microstructure of Cu_(16.0)In_(33.0)Se_(51.0) after 20 d at 500° C.; water quench; SEM 400×.

[0078]19. Microstructure of Cu_(18.0)In_(30.0)Se_(52.0) after 13 d at 500° C.; water quench; SEM 400×.

[0079]20. Microstructure of Cu_(24.4)In_(25.2)Se_(50.4) after 3 d at 500° C., 4 d at 300° C., and 13 d at 180° C.; water quench; SEM 400×.

[0080]21. Equilibrium phase diagram Cu—In.

[0081]22. Equilibrium phase diagram Cu—Se.

[0082]23. Equilibrium phase diagram In—Se.

[0083]24. Schematic drawing of a ternary eutectic four-phase plane and a transition plane.

[0084]25. Constellations leading to the eutectic type of critical tie lines, such as T_(k11), T_(k12) and T_(k13).

[0085]25 a. Constellation leading to the metatectic critical tie line T_(k11) (δ_(H)⇄α+L₂).

[0086]25 b. Phase equilibria at temperatures below the metatectic critical tie line T_(k11).

[0087]25 c. Constellation leading to the monotectic critical tie line T_(k12) (L₁⇄L₂+α).

[0088]25 d. Phase equilibria at temperatures below the monotectic critical tie line T_(k12).

[0089]25 e. Constellation leading to the eutectic critical tie line T_(k13) (L₂⇄α+γ).

[0090]25 f. Phase equilibria at temperatures below the metatectic critical tie line T_(k13).

[0091]26. Projection of the liquidus surface of subsystem II (In—In₂Se₃—Cu₂Se—Cu).

[0092]26 a. Liquid phase isotherms, subdivision of the liquidus surface, and position of critical liquid phases at U₁ through U₁₆, mo_(T1), mo_(T2), E_(T1), E_(T2), T_(k11), T_(k12), and T_(k13).

[0093]26 b. Quasibinary section In₂Se₃—Cu₂Se over the temperature interval between 850 and 1050° C.

[0094]26 c. Schematic drawing showing the liquidus surface of the ternary phase HT.

[0095]26 d. Graphical representation of the critical tie lines T_(k11) and T_(k12).

[0096]26 e. Schematic drawing indicating the subdivision of the liquidus surface by In—Se phases.

[0097]26 f. Subdivision of the liquidus surface at the In-rich corner.

[0098]27. Projection of four-phase planes, critical tie lines, and double saturation edges onto the concentration plane of the In—In₂Se₃—Cu₂Se—Cu subsystem.

[0099]27 a. Projection of the four-phase planes U₁ through U₁₆, position of the critical tie lines T_(k11) through T_(k13), and position of the ternary monotectica mo_(T1), mo_(T2).

[0100]27 b. Quasibinary section In₂Se₃—Cu₂Se over the temperature interval between 850 and 1050° C.

[0101]27 c. Schematic drawing indicating the position of the four-phase planes at U₁ and U₁₇ and the position of the critical tie lines T_(k1), T_(k2).

[0102]27 d. Schematic drawing indicating the position of the four-phase planes U₂, U₅, U₆, U₈, U₉, and U₁₁.

[0103]27 e. Projection of the four-phase planes E_(T1) (L₂⇄α+β+Cu₂Se_(H)) and e_(Tsol) (β⇄α+α+α_(Cu)).

[0104]28. Isopleth In_(80.0)Se_(20.0)—Cu_(80.0)Se_(20.0).

[0105]29. Isopleth In_(60.0)Se_(40.0)—Cu_(60.0)Se_(40.0).

[0106]30. Isopleth In_(50.0)Se_(50.0)—Cu_(50.0)Se_(50.0).

[0107]31. Isopleth CuInSe₂—Cu_(70.0)In_(30.0).

[0108]32. Isopleth Cu_(25.0)In_(25.0)Se_(50.0)—Cu_(50.0)In_(50.0).

[0109]33. Color micrograph revealing the microstructure of Cu_(48.0)In_(14.0)Se_(38.0). Brown regions belong to the α phase, white regions to the δ phase; LM 500×.

[0110]34. Microstructure of Cu_(26.0)In_(26.0)Se_(48.0) after 15 h at 700° C.; water quench.

[0111]34 a. SEM×1000; α (gray)+L₁ (bright, fine grains).

[0112]34 b. SEM×4000; enlargement of FIG. 34a revealing details in the microstructure of L₁.

[0113]35. Microstructure of Cu_(33.0)In_(33.0)Se_(34.0) after cooling down from the liquid state to room temperature at 5 K/min during DTA.

[0114]36. Isothermal section showing subsystem II (In—In₂Se₃—Cu₂Se—Cu) at 500° C.

[0115]37. Microstructure of Cu_(48.0)In_(14.0)Se_(38.0) after 4 d at 500° C.; water quench.

[0116]37 a. SEM 100×; Cu₂Se_(H/R) (dark gray)+α (light gray)+α_(Cu) (white).

[0117]37 b. SEM 1000×; Cu₂Se_(H/R) (dark gray)+α (light gray)+α_(Cu) (black).

[0118]38. Microstructure of Cu_(28.0)In_(33.4)Se_(38.6) after 4 d at 500° C.; water quench; SEM×200; In₄Se₃ (light gray)+η(white)+α (dark gray).

[0119]39. Microstructure of Cu_(66.0)In_(30.0)Se_(4.0) after 21 d at 500° C.; water quench; etched; LM 250×; δ (gray)+α (black, small fraction).

[0120]40. Microstructure of Cu_(77.0)In_(16.0)Se_(7.0) after 21 d at 500° C.; water quench; etched; LM 250×; δ (gray)+α_(Cu) (white)+α (black, small fraction).

[0121]41. Microstructure of Cu_(48.0)In_(22.0)Se_(30.0) after cooling from the liquid state down to room temperature at 5 K/min during DTA.

[0122]41 a. SEM 300×; L₁ (bright)+L₂ (dark).

[0123]41 b. SEM 1000×; enlargement of FIG. 41a, revealing details in the microstructure of L₂.

[0124]42. Microstructure of Cu_(46.0)In_(12.5)Se_(41.6) after 15 min at 1020° C. (liquid); cooling from 1020° C. down to room temperature at 2 K/min.

[0125]42 a. SEM 2000×; Cu whiskers form at the surface during solidification.

[0126]42 b. SEM 3000×; different region of the same specimen.

[0127]43. Liquidus projection and liquidus isotherms in the Cu—In—Se ternary phase diagram.

[0128]43 a. Liquidus isotherms, partitioning of the liquidus, scheme of eutectic, monotectic, and peritectic reactions, position of critical tie lines, and position of liquid phases of transition equilibria, ternary monotectica, and ternary eutectica.

[0129]43 b. Schematic drawing indicating the partitioning of the liquidus near the Se-rich corner.

[0130]43 c. Schematic drawing showing the position of the liquidus phases involved in the transition equilibria U₂₀ and U₂₁ and the position of the liquidus surfaces of CuSe₂, γ-CuSe, and Cu₂Se_(H).

[0131]43 d. Schematic drawing indicating the liquidus surfaces of indium selenides.

[0132]43 e. Characteristic features of some critical tie lines.

[0133]43 f. Schematic drawing showing the liquidus surface of the high-temperature phase H_(T) (Cu₁₃In₃Se₁₁).

[0134]43 g. Partitioning of the liquidus near the In-rich corner (schematic drawing).

[0135]44. Schematic drawing explaining the formation of the three-phase space L₃+L₄+δ_(H).

[0136]44 a. Phase fields at T=835° C., the temperature of T_(k14).

[0137]44 b. Phase fields below the temperature of T_(k14).

[0138]44 c. Extension of the three-phase space L₃+L₄+δ_(H).

[0139]45. Isopleth Se—CuInSe₂.

[0140]46. Isopleth In_(20.0)Se_(80.0)—Cu_(20.0)Se_(80.0).

[0141]47. Isopleth In₂Se₃—Cu_(40.0)Se_(60.0).

[0142]48. Microstructure of Cu_(30.0)In_(10.0)Se_(60.0) after 1 d at 500° C.; water quench.

[0143]48 a. SEM 400×; L₄ (gray)+Cu₂Se_(H) (dark)+α (bright).

[0144]48 b. LM 500×, bright-field, no etching; L₄ (gray, fine-grained)+Cu₂Se_(H) (light brown)+α (dark brown).

[0145]49. Microstructure of Cu_(30.0)In_(10.0)Se_(60.0) after 2 d at 320° C.; water quench.

[0146]49 a. SEM 200×; α (bright)+CuSe₂ (dark gray).

[0147]49 b. LM 500×, bright-field, polarized light; α (gray)+CuSe₂ (finegrained).

[0148]50. Isothermal section at 900° C.

[0149]51. Isothermal section at 800° C. The symbols β₁ and δ₁ are shortcuts for β-In₂Se₃ and δ-In₂Se₃.

[0150]52. Isothermal section at 500° C. The legend introduces a few shortcuts for ternary phases and indium selenides.

[0151]53. Isopleth Cu_(10.0)In_(90.0)—Cu_(10.0)Se_(90.0).

TABLES

[0152] 1. Scheil reaction scheme of the In—In₂Se₃—Cu₂Se—Cu subsystem.

[0153] 2. Scheil reaction scheme of the Se—CuInSe₂—Cu₂Se subsystem (IIIb in FIG. 1).

[0154] 3. Scheil reaction scheme of the In₂Se₃—Se—CuInSe₂ subsystem (IIIa in FIG. 1). The symbols δ₁, γ_(2/3), and α3 are shortcuts for δ-In₂Se₃, γ-In₂Se₃ and α-In₂Se₃, respectively.

[0155] 4. Boundaries of the compositions for the four surface areas of primary crystallization of the α-phase.

[0156] We have carried out a thorough investigation of the entire Cu—In—Se phase diagram, including the liquidus surface of the entire ternary system and with particular emphasis on the In₂Se₃—Cu₂Se section. We present the results of these experiments in three Parts, as indicated by FIG. 1. In Part I we discuss the In₂Se₃—Cu₂Se section of the phase diagram. Parts II and III deal with the Cu—In—In₂Se₃—Cu₂Se and In₂Se₃—Cu₂Se—Se subsystems, respectively. For each subsystem we present the corresponding part of the liquidus surface, a reaction scheme, and various vertical and isothermal sections of the phase diagram. Part II, moreover, includes the phase diagrams of the three binary boundary systems, Cu—In, Cu—Se, and In—Se.

1. Part I 1. Experimental

[0157] 1.1. Production of Solid Solutions

[0158] The In—Se, Cu—Se, and Cu—In—Se solid solutions were prepared by fusing Cu, In, and Se with a total mass between 0.25 and 1.00 g in a high-frequency electromagnetic-field. The Cu we used had a purity of 99.999%, the In and the Se a purity of 99.9999%. The Cu was rolled to sheets with a thickness of 0.1 mm and cut into slices, Se was supplied as granules (˜1 mm in diameter), and In was cut into small pieces. To avoid problems arising from the large heat of formation and the high vapor pressure of Se, the ingot was encapsulated in silica tub s with particularly strong walls. These tubes were filled with high-purity Ar at 820 mbar. Our experimental procedure combines the following advantages: (i) The high-frequency furnace we employed provides precise control of the temperature. (ii) Encapsulating the ingot in silica tubes allowed us to observe the material during processing. In particular, by observing the diffusion zone at Cu stripes protruding from the Se or In melt we could carefully control of the temperature. (iii) Owing to the large heat of formation and the high vapor pressure of Se, fusing of Cu—In—Se alloys normally causes excessive agitation of the components. The Ar filling of the tubes, however, solves this problem.

[0159] After fusing the ingot, the newly formed solid solutions were annealed in a muffle furnace for up to one hour at 950° C. To improve the homogeneity of the temperature distribution during this treatment we embedded the silica tubes in a large body of heat-resistant steel. Subsequently, we cooled the tubes in air and inspected the ingot. By mechanical agitation we detached the newly formed material and any left-overs of the ingot from the tube walls, put the tube back into the muffle furnace and melted it a second time. Depending on the composition, the melting point varied between 950 and 1020° C. We found that thermodynamic equilibrium can be approached most efficiently by a cooling procedure that includes periods of constant cooling rate (2 K/min) as well as periods at constant temperatures: 500° C., 300° C., and 10° C. In the following, we denote this procedure as ‘step cooling’.

[0160] 1.2 Differential Thermal Analysis

[0161] For differential thermal analysis (DTA) we encapsulated the alloys in silica tubes with thin walls and filled these with high-purity Ar at a pressure of 800 mbar to avoid evaporation of Se. As reference material we used 0.3 g Cu. Our DTA apparatus allows us to analyze two samples simultaneously, together with the (same) reference material. During the analysis the corresponding silica tubes reside in a metal chamber, which improves the temperature stability. The thermocouples probing the temperature were in direct contact with the silica tubes. The heating rate varied between 2 and 10 K/min, and the total mass of the DTA samples was between 0.25 and 0.5 g. At any temperature our apparatus allows us to quench the specimen by crushing the silica tubes while immersing them in water. Thus, we can analyze changes of the microstructure that occur along with phase transformations ex-situ by metallography and by TEM.

[0162] 1.3 Characterization of Microstructure and Crystal Structure

[0163] For x-ray diffraction (XRD) analysis we employed the Guinier method. After pulverizing the corresponding material, encapsulating it in silica tubes, and relaxing the powder for one or two days at different temperatures we studied it with Cu—K_(α1) radiation in a Guinier camera (Enraf-Nonius FR 552). For phase identification we used line diagrams of homogeneous phases as “fingerprints”.

[0164] For metallographic studies by light microscopy (LM) and scanning electron microscopy (SEM) we used conventional methods of surface preparation, including polishing with diamond paste. For transmission electron microscopy (TEM) we employed the preparation method developed by Strecker et al. (Praktische Metallographie 30 (1993) 482). The TEM samples were investigated in a JEM 2000 FX (JEOL) transmission electron microscope, equipped with a system (Tracor Northern) for x-ray energy-dispersive analysis (XEDS).

2. The In—Se Component System

[0165] The In—Se component system is of major importance for the phase equilibria of the In₂Se₃—Cu₂Se isopleth and for the isothermal section at 500° C. that we present in this publication. In recent work, the number of phases in this system, their composition range, and the sequence of their formation have been re-determined as depicted in FIG. 2. Accordingly, five different indium selenides occur in the composition range between 40 and 59 at. % Se: In₄Se₃, InSe, In₆Se₇, In₉Se₁₁, and In₅Se₇. The indium selenide In₂Se₃, which bounds the In₂Se₃—Cu₂Se isopleth on the left, has been observed in four different modifications: δ-In₂Se₃, β-In₂Se₃, γ-In₂Se₃, and α-In₂Se₃. Experimental data on the crystal structures of these modifications are compiled in Lutz et al. (J. Less Common Materials 143 (1988), 83-92) and Pfitzner and Lutz (J. Solid State Chem. 124 (1996), 305-308).

[0166] On cooling down from high temperatures, δ-In₂Se₃ forms congruently from the melt at 891° C. and transforms to γ-In₂Se₃ at 745° C. Stoichiometric In₂Se₃ does not undergo further transformations, and at room temperature one retains γ-In₂Se₃. Lutz et al. (supra) have obtained the same result by XRD. Recording XRD diagrams while heating, however, Lutz et al. observed the transformations γ-In₂Se₃→β-In₂Se₃ at 687° C. and β-In₂Se₃→δ-In₂Se₃ at 807° C. Furthermore, on cooling samples that had been tempered above 697° C., Lutz et al. observed several metastable phases: α-In₂Se₃ (H), α-In₂Se₃ (R), β′-In₂Se₃, and β-In₂Se₃ (R). According to our experimental data, however, α-In₂Se₃ constitutes a stable phase that forms from Se and γ-In₂Se₃ in a peritectoid reaction at 201° C. and is minutely richer in Se than stoichiometric In₂Se₃.

[0167] Furthermore, FIG. 2 indicates that on heating, β-In₂Se₃ decomposes into the melt p₂ and δ-In₂Se₃ in a peritectic reaction at 880° C. At 198° C., an eutectoid reaction decomposes β-In₂Se₃ into In₅Se₇ and γ-In₂Se₃. Similar to α-In₂Se₃, β-In₂Se₃ slightly deviates from the stoichiometric composition In₂Se₃, however towards the In-rich side of the phase diagram.

[0168] In order to determine the temperatures mo₁ and p₂ through p₆ of the corresponding monotectic and peritectic reactions in FIG. 2 we performed DTA during heating, not cooling, after first equilibrating the specimen at the starting temperature. This was necessary because when cooling down a melt with a Se content between 48 and 54 at. % at a rate between 2 and 10 K/min, supercooling occurs and leads to metastable states. FIGS. 3a and 3 b present the corresponding metastable phase diagram by solid lines, while the dotted lines correspond to the stable phase diagram of FIG. 2. Black solid triangles indicate where we have detected transformation-related effects by DTA during cooling. The metastable equilibria at e_(m) and p₂′ have already been described in earlier work by Gödecke et al. (J. Phase Equ. 19 (1998), 572-576).

3. Critical Tie Lines

[0169] The Cu—In—Se system in general, and in particular the In₂Se₃—Cu₂Se isopleth comprise a variety of invariant equilibria. To prepare the subsequent discussion of our experimental results, this section briefly reviews the different types of such equilibria.

[0170] Invariant equilibria in ternary systems belong to either one of two families: (i) four-phase equilibria and (ii) invariant three-phase equilibria. Four-phase equilibria are further divided in: ternary eutectica, ternary peritectica, and transition equilibria. Invariant three-phase equilibria occur in the binary boundary systems and in quasibinary sections of a ternary system, where the two constituting phases behave like the elements of a binary system. In the example of the In₂Se₃—Cu₂Se section, which we show further below to qualify as quasibinary indeed, these quasibinary “elements” correspond to In₂Se₃ and Cu₂Se. In quasibinary sections, therefore, three-phase equilibria imply invariance—in accordance with Gibbs' phas rule for two components. For this reason, one denotes the tie lines that indicate invariant three-phase equilibria in the phase diagram as “critical tie lines”.

[0171] There are two basic types of critical tie lines (or invariant three-phase equilibria): (i) eutectic and (ii) peritectic critical tie lines, depending on, whether a liquid phase decomposes into two solid phases (L→α+β), or a liquid phase reacts with a solid phase to produce another solid phase (L+α→β). From these basic types one may derive further categories of critical tie lines, namely monotectic critical tie lines (L₁→L₂+α), metatectic (α→L+β), eutectoid (α→γ+β), or peritectic critical tie lines (α+⊖→γ).

[0172] All these different types of critical tie lines do actually occur in the Cu—In—Se system. Moreover, we have found a variety of four-phase equilibria. According to Gibbs' phase rule, four-phase equilibria in ternary systems imply non-variance. Among the four-phase equilibria, one distinguishes between three types: (i) ternary eutectica, (ii) ternary peritectica, and (iii) transition planes, planes at whose temperature two three-phase equilibria are replaced by two other three-phase equilibria (see FIG. 24). As variants of the latter, we have observed a variety of ternary monotectic reactions and ternary eutectoid four-phase planes. These four-phase equilibria and the critical tie lines essentially determine the phase equilibria of the Cu—In—Se ternary system. In all three parts of this work, therefore, we explain some particularly important types of invariant equilibria by means of schematic graphical illustrations and by reaction schemes.

[0173]FIG. 4 illustrates the formation of a eutectic critical tie line (FIG. 4a) and a peritectic critical tie line (FIG. 4b). Eutectic critical tie lines always occur, for example, if, on cooling, the liquidus isotherms of two different two-phase regions touch each other. In FIG. 4a this occurs at T=T_(c), where the tie lines of the two-phase regions L+δ_(H) and L+H_(T) form a common, “critical” tie line T_(k). At the critical point, the point where the liquidus isotherms touch each other, the liquid phase decomposes into δ_(H) and H_(T) in a eutectic reaction. Below the critical temperature T., FIG. 4a indicates the existence of two monovariant three-phase equilibria L+δ_(H)+H_(T) (dark regions), one on each side of the critical tie line.

[0174] The isothermal section in FIG. 4b explains a peritectic critical tie line. The plane of this isothermal section just intersects with the maximum of the phase field δ_(H), and the tie lies between δ_(H) and the melt L extend from the point of intersection in a radial arrangement. On cooling down to the critical temperature T_(c) of this isothermal section, δ_(R) forms in the peritectic reaction L+δ_(H)→δ_(R). At this temperature the solid phases δ_(H) and δ_(R) and the melt L make a common, critical tie line (dotted line in FIG. 4b). At temperatures below T_(c) the critical tie line develops into two monovariant peritectic three-phase spaces L+δ_(H)+δ_(R) (dark regions).

[0175]FIG. 5 demonstrates the constellations that lead to eutectic and peritectic critical tie lines by means of three-dimensional sketches. In these drawings one can recognize particularly well the evolution of the respective three-phase spaces that develop on cooling below the critical temperature T_(c). FIG. 5a shows the three-phase spaces L+δ_(H)+H_(T) for a eutectic critical tie line, while FIG. 5b shows the three-phase spaces L+δ_(H)+δ_(R) beneath a peritectic critical tie line. FIG. 5c shows the region of homogeneous δ_(R), which forms by peritectic reaction, as well as the two-phase and three-phase equilibria that bound to δ_(R) at low temperatures.

[0176] The examples of FIG. 5 also demonstrate that one may denote a isopleth as “quasibinary” only if all critical tie lines section and all tie lines of adjacent two-phase equilibria lie parallel to the plane of the section. If not—if, for example, a critical tie line makes a finite angle with the plane of the isopleth—the section includes not only invariant but also monovariant three-phase-spaces, and the tie lines of the adjacent two-phase equilibria exhibit an inclination versus the plane of the section.

[0177] The phases denoted as δ_(H, R,) and H_(T) in FIGS. 4 and 5 actually exist in the Cu—In—Se system and have a finite extension within the isopleth In₂Se₃—Cu₂Se. In Examples II and III we describe the constellations that lead to metatectic and monotectic critical tie lines.

4. Experimental Results

[0178] The results in this Example and those in Examples II and III prove that In₂Se₃—Cu₂Se indeed constitutes a quasibinary system: Along the In₂Se₃—Cu₂Se isopleth of the Cu—In—Se system we have found a total of 10 critical tie lines, and all these lie in the plane of the section. Furthermore, the data we have obtained for the adjacent subsystems, which we describe in Examples II and 1II, reveals that all tie lines become parallel to the In₂Se₃—Cu₂Se isopleth as one approaches the plane of this isopleth.

[0179] 4.1 Stable Equilibria of the In₂Se₃—Cu₂Se Subsystem

[0180]FIG. 6 presents the major result of this publication, the In₂Se₃—Cu₂Se section of the Cu—In—Se phase diagram. To obtain this diagram we investigated a total of 73 different alloys with the experimental methods described in section 1. A dense sampling of the composition space was necessary to distinguish between the primary crystallization surfaces of Cu₂Se and δ-In₂Se₃, and between those of the ternary phases δ_(H),δ_(R) (CuIn₃Se₅), α (CuInSe₂), γ_(T) (CuIn₅Se₈), and H_(T) (Cu₁₃In₃Se₁₁). Since there has been confusion about the designation of these phases in the literature, we have designated them such that their names conform with those in the three boundary systems Cu—Se (Example II), In—Se (section 2), and Cu—In (Example II). The subscripts “H” and “R” indicate high temperature and room temperature modifications, respectively, while the subscript “T” serves to distinguish ternary phases from binary phases with the same symbol. Mixed subscripts, like Cu₂Se_(H/R) or δ_(H/R), indicate a transformation from a high-temperature to a room temperature modification that we were not able to suppress by quenching. Non-equilibrium phases (including metastable phases) are marked by the subscript “m”. T_(k1), T_(k2), . . . T_(k10) denote the 10 critical tie lines. In order to facilitate comparison with the results we show in Examples II and III, FIG. 6 indicates the composition in atomic percent copper rather than mole percent Cu₂Se. Some further details of our nomenclature, like abbreviated names for some phases, are given in legend of the respective phase diagrams or reaction schemes.

[0181] In the following three sections we describe the two-phase equilibria and the 10 critical tie lines of the In₂Se₃—Cu₂Se subsystem. Section 4.1.1 deals with the composition range between CuInSe₂ and Cu₂Se, while in sections 4.1.2 and 4.1.3 we describe compositions between In₂Se₂ and CuInSe₂.

[0182] 4.1.1 The Composition Range CuInSe₂—Cu₂Se

[0183]FIG. 6, and in particular the enlarged section in FIG. 6c indicate that on cooling down from high temperatures the crystallization of solid begins with the ternary phases δ_(H) and H_(T), which have their maximum melting points of 1002° C. and 947° C. at 23.5 at. % and at 46.5 at. % Cu, respectively. Each one of the reactions T_(k1) through T_(k6) involves one liquid phase and corresponds to either a eutectic or a peritectic critical tie line (compare FIG. 4). The high-temperature phase H_(T) only exists over a narrow temperature interval of 24 K. At T_(k3) (923° C., FIG. 6c) H_(T) decomposes in to δ_(HR)+(Cu, In)₂Se_(H/R) in a eutectic reaction. H_(T) has the composition Cu_(46.5)In_(12.2)Se_(41.3), which roughly corresponds to the composition Cu₁₃In₃Se₁₁. We have not observed, however, the high-temperature phase with the composition Cu₅₀In₁₀Se₄₀ (Cu₅InSe₄).

[0184] The high-temperature phase δ_(H) also decomposes in a eutectoid reaction; according to FIGS. 6a and d, δ_(H) decomposes into α+(Cu, In)₂Se_(H/R) at T_(k7) (785° C.). At T_(k10) the high-temperature modification Cu₂Se_(H) transforms to Cu₂Se_(R)+α. The phases δ_(H), H_(T), and (Cu, In)₂Se_(H) cannot be stabilized down to room temperature by water quenching. Data points indicating the extension of homogeneous (Cu, In)₂Se_(H) are located at 52.0 at. % Cu and 942° C., at 58.0 at. % Cu and 785° C., and at 66.4 at. % Cu and 450° C.

[0185] To demonstrate the evolution of the microstructure for alloy compositions between CuInSe₂ and Cu₂Se we have included FIGS. 7, 8, and 7. FIG. 7a reveals the microstructure that results from eutectoid decomposition of the high-temperature phase H_(T) into δ_(H/R)+(Cu, In)₂Se_(H/R) (dark). To obtain this microstructure the alloy Cu_(46.5)In_(12.2)Se_(41.3) had been quenched from 935° C. The lamellar, even distribution of phases within the formerly homogeneous H_(T) grains indicates the eutectoid decomposition. On tempering the same alloy for 12 d at 500° C. and subsequent quenching in water one obtains the phase equilibrium α+(Cu, In)₂Se_(H/R) (FIG. 7b). The SEM back-scattering micrograph shows a as bright and (Cu, In)₂Se_(H/R) as dark regions. The eutectoid decomposition of δ_(H) into α+(Cu, In)₂Se_(H/R) shows clearly within the bright regions of a in FIG. 7b. The fine-grained bright precipitates within the dark regions of (Cu, In)₂Se_(H/R) consist of α (CuInSe₂).

[0186]FIGS. 8 and 9 reveal the microstructure of Cu_(42.0)In_(15.0)Se_(43.0) (FIG. 8) and Cu_(60.0)In_(4.0)Se_(36.0) (FIG. 9) after heating to 850° C. and quenching in water. These micrographs serve to document the microstructure of (Cu, In)₂Se_(H) after quenching. According to the phase diagram in FIG. 6, heating Cu_(42.0)In_(15.0)Se_(43.0) to 850° C. leads to a microstructure that consists of the phases δ_(H) and (Cu, In)₂Se_(H). Since quenching in water does not stabilize these two phases down to room temperature, FIG. 8 reveals precipitates of the α phase (bright) in the (Cu, In)₂Se_(H/R) matrix. Moreover, the micrographs in FIGS. 8a and 8 b reveal that the eutectoid decomposition of δ_(H) into (Cu, In)₂Se_(H/R)+α has taken place at T_(k7) in the formerly homogeneous regions of δ_(H) (bright).

[0187]FIG. 9 presents the microstructure of Cu_(60.0)In_(4.0)Se_(36.0). The formerly homogeneous matrix of (Cu, In)₂Se_(H/R) (dark) reveals precipitates (bright), which are lined up along crystallographic directions. Comparison with FIGS. 8a and b reveals that these precipitates consist of α. By DTA data of some alloys with a Cu content between 28 and 57 at. % (FIG. 6) we have observed spurious effects between 600 and 650° C. These effects appear to have their origin in small deviations from the desired alloy composition.

[0188] 4.1.2 The Composition Range In₂Se₃—CuInSe₂ Between 10 and 25 at. % Cu

[0189] The composition range between 10 and 25 at. % Cu in FIG. 6 features solid state phase transformations from the high-temperature phase δ_(H) to δ_(R) and from δ_(H) to α. The point where the α phase field has its maximum temperature, 818° C., does not correspond to the stoichiometric composition with 25.0 at. % Cu but only to 24.8 at. % Cu. By DTA it was not possible to determine with sufficient precision the field of compositions where δ_(R) coexists with δ_(H) because the heat released by this transformation is too small. Therefore, the field δ_(R)+δ_(H) appears with dotted lines in FIG. 6. These lines were determined by XRD: From alloys with a Cu content between 10.0 and 18.5 at. %, which had been annealed at temperatures above the dotted lines, we obtained XRD patterns in which the superlattice reflections of the δ_(R) phase appeared diffuse. Below the dotted lines, in contrast, we always observed sharp superlattice reflections. On the basis of these observations, however, we cannot exclude that the transformation δ_(H)→δ_(R) is of higher order. Extrapolation of our data for the δ_(H)→δ_(R)transformation leads from 18 at. % Cu and 520° C. to 10 at. % Cu and 910° C. and then directly to the field L+δ_(H) in FIG. 6.

[0190] From the critical point at 818° C. two regions δ_(H)+α extend towards lower temperatures. One of these two-phase regions ends at the critical tie line T_(k7) (785° C.), while the oth r one first contributes to the critical tie line T_(k8) (520° C.) and then persists as δ_(R)+α down to room temperature because of the phase transformation δ_(H)→δ_(R).

[0191] Between 500 and 550° C. the compositional extension of the α phase field reaches its maximum of 3.5 at. % Cu. Further decrease of the temperature narrows this field to ⁻1 at. % Cu at 100° C. The lateral extension of the two-phase region δ_(H/R)+α in FIG. 6 was only observed after step cooling—when interrupting the standard cooling process, which proceeded at 2 K/min, by extended annealing at 500° C. (60 h), 300° C. (70 h), and 100° C. (140 h). The boundaries of the α phase field in FIG. 6 were determined by combining the data we obtained by SEM, TEM, DTA, and XRD.

[0192] In alloys of the δ_(R)+α region that had undergone our special procedure of step cooling we have observed the same precipitates with several different dispersions. Such a microstructure with precipitates on different length scales develops because the phase fields of α and β become narrower on both sides with decreasing temperature. The micrographs of FIGS. 10 and 11a show large precipitates in which further decomposition has occurred during the isothermal annealings of our step cooling procedure. During each one of the isothermal annealings at 500, 300 and 100° C. the fractions of the individual phases adjust themselves according to the inverse lengths of the respective tie line sections—thus according to the lever rule.

[0193] Completely different volume fractions of α and δ_(H/R) are obtained, however, when cooling down from 900° C. to room temperature at a constant rate of 5 K/min. This becomes obvious when comparing the micrographs of Cu_(18.5)In_(28.9)Se_(52.6) in FIG. 11a with that in FIG. 11b. While in FIG. 11a the volume fractions of α and δ_(H/R) obey the lever rule, FIG. 11b indicates an increased volume fraction of α (dark). Moreover, the two micrographs reveal significant differences in the morphology of the precipitates after the two different cooling procedures.

[0194] The micrographs in FIGS. 12 and 13 serve to compare the microstructures of alloys annealed at 500° C. for 12 d and quenched in water (FIGS. 12a and 13 a) with the microstructure of alloys that have undergone our step cooling procedure (FIGS. 12b and 13 b). The alloy with 21.0 at. % Cu (Cu_(21.0)In_(27.5)Se_(51.5)) and the one with 23.5 at. % Cu (Cu_(23.5)In_(26.0)Se_(50.5)) that have been annealed at 500° C. and quenched in water consist of δ_(R)+α (FIG. 12a) and pure α (FIG. 13a), respectively. FIG. 12a features the δ_(R) phase as bright stripes. Step cooling of these alloys, in contrast, leads to different volume fractions of α and δ_(R) (FIG. 12b).

[0195] Cooling down the alloy with 23.5 at. % Cu from its homogeneous state at 500° C. leads to a fine dispersion of δ_(R) precipitates (FIG. 13b). Here and there we have also observed round precipitates with a bright SEM backscattering contrast in this alloy. These precipitates turned out to be InSe. This indicates that the homogeneity range of the α phase becomes rather narrow at temperatures around 100° C.; at low temperatures already small deviations from the stoichiometric composition CuInSe₂ lead to precipitation of various different phases (section 2).

[0196] The micrographs we have described so far indicate that not only the duration of an annealing treatment at a given temperature but also the thermal history has a strong effect on the microstructure that results at this particular temperature, particularly at low temperatures. In principle one could quantitatively establish the correlation between the cooling procedure and the microstructure, but this would require an unmanageable number of supercooling diagrams.

[0197] 4.1.3 The Composition Range In₂Se₃—CuInSe₂ Between 0 and 12 at. % Cu

[0198] The composition range between 0 and 12 at. % Cu features the critical tie lines T_(k4), T_(k5), T_(k6), and T_(k8) and the ternary phase CuIn₅Se₈, which is denoted as γ_(T) in FIG. 6. At T_(k4) (910° C.) the room temperature modification δ_(R) forms by the peritectic reaction L+δ_(H)→γ_(T). Between T_(k4) (910° C.) and T_(k5)=900° C., therefore, δ_(R) precipitates directly from the melt. The critical tie line T_(k5) represents the formation of γ_(T) (CuIn₅Se₈) by the peritectic reaction L+δ_(R)⇄γ_(T). A ternary phase of the same composition has also been described in Manolikas et al. (Physica Status Solidi A55 (1979), 709-722) and Boehnke and Kuhn (J. Mater. Sci. 22 (1987), 1635-1641). Some of the thermal effects that we have observed by DTA near 880° C. support the hypothesis that γ_(T) actually has different modifications at temperatures below and above 880° C. (schematic drawing FIG. 6b), thus transforms from a high-temperature modification (γ_(HT)) to a room temperature modification (γ_(RT))

[0199] The last critical tie line that involves a liquid phase, T_(k4), occurs at 870° C. At T_(k4) the melt L decomposes by the eutectic reaction L→δ-In₂Se₃+γ_(T). In FIG. 6 we have denoted the phase δ-In₂Se₃ as δ₁. The polymorphic transformation from δ-In₂Se₃ to γ-In₂Se₃ leads to the critical tie line T_(k5) (742° C.), the last critical tie line on the In-rich side of the In₂Se₃—Cu₂Se section. Below T_(k8) the phases γ-In₂Se₃ and γ_(T) coexist down to room temperature.

[0200] In Example II, where we describe the subsystem In—In₂Se₃—Cu₂Se—Cu (FIG. 1), we summarize the 10 critical tie lines of the In₂Se₃—Cu₂Se section and its four-phase reactions in a reaction scheme.

[0201] 4.2 Phase Diagram of Supercooled Alloys

[0202] Annealing at 850 to 900° C. and subsequent quenching of alloys with a Cu content between 15 and 28 at. % has revealed the effect of supercooling on the precipitation of a from δ_(H/R) and on the transformation δ_(H)→α near the maximum of the afield at 818° C. FIGS. 6a, 6 b, 14 a, and 14 b depict the result of these experiments. XRD studies on pulverized samples of the respective alloys showed that quenching in water cannot suppress the reaction δ_(H)→α for alloys with a Cu content between 20.0 and 26.0 at. %; for these alloys the XRD patterns exhibited sharp lines of the α phase. TEM confirmed the phase transformation and revealed that for Cu contents between 20.0 and 25.5 at. % δ_(H) transforms completely to α. The alloy with 26.0 at. % Cu, in contrast, already features small precipitates of (Cu, In)₂Se_(H/R) in the α matrix (FIG. 15).

[0203]FIGS. 14a and b show the phase transformation δ_(H)→α in the presence of supercooling in comparison with the equilibrium phase diagram for Cu contents between 15.0 and 30.0 at. %. The legend indicates the symbols we use to indicate which data points we have obtained by XRD and which ones by DTA.

[0204] XRD diagrams of alloys with a Cu content between 15.0 and 18.5 at. % exclusively exhibited the reflections of δ_(R). In alloys with a Cu content between 20.0 and 26.0 at. % the temperatures of the thermal effects that we have observed by DTA during heating and cooling agree very well with each other and confirm the upper boundary of the δ_(H)+α phase field in FIG. 14a. The corresponding composition range, between 20.0 and 26.0 at. % Cu, nearly coincides with the composition range over which annealing at 850° C. and quenching produces homogeneous α (solid circles). Only between 18.5 and 20.0 at. % Cu supercooling retards the transformation δ_(H/R)→α, as we have observed by DTA analysis carried out at a cooling rate of 5 K/min.

[0205] The phase diagram in FIG. 14b actually constitutes a “realization diagram”—the phase diagram drawn in dotted lines refers to the particular heat treatment and quenching procedure described above. For comparison, solid lines indicate the equilibrium phase diagram. The dotted lines commence in the maximum of the α phase field and extend over the entire section of the phase diagram shown in this figure. Above 24.8 at. % Cu, supercooling shifts the borderlines of the phase fields towards higher Cu contents; the critical tie line T_(k7) moves to a lower temperature, (T_(k7)′), and the eutectoid point follows a line that extrapolates the lower boundary of the δ_(H) phase field on the right of the a maximum. Between 18.0 and 19.0 at. % Cu the critical tie line T_(k9) shifts to a lower temperature (T_(k9)′). Comparison between the dotted and the solid lines in FIG. 14b indicates that supercooling can reduce the width of the two-phase field δ_(R)+α to 0.6 at. % (field δ_(Rm)+α_(m); according to the convention introduced in section 5.1, non-equilibrium phases are denoted by the subscript “m”). The field δ_(R)+α becomes narrower because supercooling extends the regions of both, homogeneous α and homogeneous δ at 300° C. (fields δ_(Rm) and m in FIG. 14b).

[0206] Most important for applications, our experiments have shown that rapid cooling can substantially extend the composition range of homogeneous α (CuInSe₂)—at 300° C. one can obtain homogeneous a between 18.5 to 25.5 at. % Cu.

[0207] The results presented in FIG. 14b indicate that the width of the phase field δ_(H/R)+α varies strongly with the thermal history. In the case of continuous cooling the cooling rate strongly influences the microstructure. This is the reason why we have applied the special step cooling procedure described in section 2 when aiming to obtain optimum equilibration in the δ_(H/R)+α phase field.

5. Isothermal Section at 500° C.

[0208] As opposed to an ordinary isopleth of a ternary phas diagram, a quasibinary section requires that all critical tie lines and all tie lines of binary phase equilibria lie in the plane of the section. In order to check whether the In₂Se₃—Cu₂Se section fulfills this criterion, we have worked out part of the isothermal section of the Cu—In—Se phase diagram at 500° C. This part allows us to view the tie lines of three-phase equilibria in the vicinity of the In₂Se₃—Cu₂Se section, too, and to examine whether these tie lines become parallel to the plane of the In₂Se₃—Cu₂Se section as they approach it. Moreover, the isothermal section at 500° C. is of major technical importance because Cu—In—Se thin films for photovoltaic applications are often fabricated at or near this very temperature. Finally, the phase diagrams of the In₂Se₃—Cu₂Se section given in the literature naturally do not fully describe the extension of the α phase (CuInSe₂), neither in the plane of the In₂Se₃—Cu₂Se section, nor in the ternary phase diagram. The latter can be assessed from a variety of isothermal sections at different temperatures.

[0209]FIGS. 16a and b show parts of the isothermal section at 500° C. This drawing correctly includes the phase equilibria that we have determined by re-investigation of the In—Se component system. Shaded areas indicate single-phase regions. FIG. 16b, an enlarged section of FIG. 16a, shows the position of the isopleth In₂Se₃—Cu₂Se as a dotted line. The intersection of the dotted lines marks the stoichiometric composition of the α phase (CuInSe₂). According to FIG. 16b, the α phase borders to nine two-phase fields and nine three-phase equilibria? On the Se-rich side of the In₂Se₃—Cu₂Se section a exhibits a somewhat larger composition range than on the Cu-rich side. The symbol L₄ in FIG. 16a indicates a Se-rich liquid phase.

[0210] The high-temperature phase δ_(H), which cannot be stabilized to room temperature by water quenching when in the In₂Se₃—Cu₂Se section but on the In-rich side of the isothermal section. At 500° C. this phase has a small region of existence, labeled by δ_(H) in FIG. 16. Our experimental observations agree well with the data according to which δ_(H) has the sphalerite structure and can be stabilized to room temperature along the tie line CuInSe₂—In_(42.0)Se_(58.0), with Cu concentrations between 11.0 and 15.5 at. %.

[0211] The high-temperature modification δ_(H) as well as the low-temperature modification δ_(R) each establish a two-phase equilibrium with α. The enlargement in FIG. 16b indicates that a narrow tree-phase space δ_(H)+δ_(R)+α separates the two-phase regions δ_(R)+α and δ_(H)+α. Furthermore, the α phase establishes two-phase and three-phase equilibria with InSe and In₄Se₃. The three-phase equilibria In₄Se₃+α+η, α+η+δ, and α+Cu+δ are discussed in part II of this work. The binary indium selenides InSe, In₄Se₃, In₆Se₇, In₉Se₁₁, and In₅Se₇ do not provide substantial solubility for Cu.

[0212] Extrapolating the tie lines of the three-phase equilibria that bound to the In₂Se₃—Cu₂Se isopleth towards the plane of the section we find the tie lines aligned with the plane of the section. This confirms that the In₂Se₃—Cu₂Se section constitutes a quasibinary section.

6. Microstructures at 500° C.

[0213] The micrographs in FIGS. 17, 18, 19, and 20 demonstrate a few of the phase equilibria of the isothermal section at 500° C. that we have discussed in the previous section. In particular, these micrographs show two-phase and three-phase equilibria that involve the α phase.

[0214]FIG. 17 exhibits the microstructure of Cu_(11.0)In_(44.0)Se_(46.0), which consists of In₄Se₃ and α (dark). FIG. 18, in contrast, shows a three-phase equilibrium. This microstructure belongs to Cu₁₆In₃₃Se₅₁ annealed at 500° C. and comprises InSe (bright), δ_(H) (gray), and α (dark). FIG. 19, finally, depicts the microstructure of Cu_(18.0)In_(30.0)Se_(52.0), which consists of a two-phase equilibrium between δ_(H) (gray) and α (dark).

[0215] Alloys near the composition of CuInSe₂ often exhibit small precipitates of InSe owing to the loss of Se during processing. In the SEM backscattering image these precipitates appear as bright round particles embedded within the α matrix (dark). FIG. 20 presents an example of such a microstructure. The alloy had a nominal composition of Cu_(24.4)In_(25.2)Se_(50.4) and was cooled down from 500° C. in two isothermal annealing steps, 100 h at 300° C. and 13 d at 180° C. The microstructure that appears in FIG. 20 confirms that at low temperatures surface that represents the precipitation of InSe from a closely approaches the ideal composition of α, CuInSe₂.

7. Conclusion

[0216] Basic research on the phase equilibria of Cu—In—Se alloys constitutes an important pre-requisite for efficient technical applications of Cu—In—Se alloys. Both, controlled preparation and systematic optimization of Cu—In—Se alloys require a thorough knowledge of the entire Cu—In—Se phase diagram, including the liquidus surface, and a deeper understanding of potential non-equilibrium states. Applying DTA, XRD, LM, SEM, and TEM to more than 70 different alloys we have obtained consistent data on the In₂Se₃—Cu₂Se section of the Cu—In—Se ternary phase diagram. The data we have obtained from our study, and particularly the isothermal section at 500° C. strongly support the hypothesis that the In₂Se₃—Cu₂Se section indeed constitutes a quasibinary section.

[0217] Furthermore, we conclude from our experiments that non-equilibrium states may play an important role in the processing of Cu—In—Se alloys. This is particularly true for equilibria involving the α phase (CuInSe₂). In thermodynamic equilibrium, the existence range of the α phase is very narrow at room temperature (about 1 at. %), but in non-equilibrium states it can reach as much as 7 at. %. This result may have important impact on the fabrication of thin film photovoltaic devices exploiting the properties of CuInSe₂.

Part II 1. General

[0218] This Part deals with subsystem In—In₂Se₃—Cu₂Se—Cu. The alloys of this subsystem were fabricated by encapsulating the ingot in quartz tubes and fusing it in a high-frequency furnace, as detailed in Part I. To determine the liquidus isotherms as well as the temperatures of the four-phase reactions and the critical tie lines, we employed differential thermal analysis (DTA) after encapsulating the specimens in silicatubes with particularly thin walls. In order to analyze the microstructure of the alloys we have employed x-ray diffraction (XRD), light-optical microscopy (LM), scanning electron microscopy (SEM), and transmission electron microscopy (TEM). Along with SEM and TEM we used x-ray energy-dispersive spectroscopy (XEDS) for elemental analysis. For further details of experimental procedures it is referred to Part I.

[0219] From the results we have obtained this Part presents the liquidus, five isopleths, the corresponding Scheil reaction scheme, and an isothermal section of the entire subsystem II (In—In₂Se₃—Cu₂Se—Cu) at 500° C. The phase equilibria of a ternary system depend on the phase equilibria of the binary component systems. Before we deal with the ternary subsystem II, therefore, we summarize the most recent data on Cu—In, Cu—Se, and In—Se.

2. Binary Component Systems

[0220] 2.1 Cu—In

[0221]FIG. 21 presents the phase diagram of Cu—In. The symbols p and e represent peritectic and eutectic reactions, respectively. β (Cu₄In) and γ (Cu₉In) constitute high-temperature phases, which decompose by eutectoid reactions at e_(sol3) and e_(sol1), respectively. Jain, Ellner and Schubert (Z. Metallk. 63 (1972), 456-461) have subdivided the phase ηnear the composition Cu_(64.0)In_(36.0) into five different modifications: A, A′, B, C, and η_(h). Following this nomenclature we have denoted the respective phases in FIG. 2 as η_(Aη) _(, η) _(A′), η_(B), and η_(h). The high-temperature phases β, γ, and η_(h) can only be stabilized to room temperature by extremely rapid cooling (splat cooling, for example).

[0222] 2.2 Cu—Se

[0223] In some regions we have corrected the phase diagram of Cu—Se published in the handbook on binary phase equilibria by Charkrabarti and Laughlin (“Binary Alloy Phase Diagrams, in: T. B. Massalski et al. (eds.) Binary Alloy Phase Diagrams, ASM International, Materials Park (1990), 1475-1476). FIG. 22 presents the corrected version. By applying DTA to four different alloys with Se fractions between 50 and 95 at. % we have re-determined the miscibility gap L₃+L₄, the monotectic point at mo₃ (51.2 at. % Se), and the temperatures of the peritectica at p₁₀ (377° C.) and p₁₁ (342° C.). The transformation from the high-temperature phase Cu₂Se_(H) to the room temperature modification Cu₂Se_(R) was only observed at 134° C. and at the stoichiometric composition. The symbols mo₁ and mo₃ represent the monotectic reactions L₁→Cu₂Se_(H)+L₂ and L₃→Cu₂Se_(H)+L₄ at 1100° C. and 523° C., respectively.

[0224] 2.3 In—Se

[0225] The component system In—Se has already been described in Example I. However, since this system is particularly important for the phase equilibria of Cu—In—Se we briefly repeat its most important properties here. FIG. 23 presents the new In—Se phase diagram In—Se published by Gödecke et al. (J. Phase Equ. 19 (1998), 572-576). The miscibility gaps L₁+L₂ and L₃+L₄ have been re-determined, and so were the positions of the monotectic points at mo₂ (520° C.) and mo₄ (750° C.). According to FIG. 23 there are seven different indium selenides that remain stable down to room temperature: In₄Se₃, InSe, In₅Se₇, In₉Se₁₁, In₆Se₇, γ-In₂Se₃, and α-In₂Se₃. For In₂Se₃ four different modifications have been observed: δ, β, γ, and α-In₂Se₃. Peritectic transformations at p₁ through p₅ lead to the following phases: β-In₂Se₃ (p₁), In₅Se₇ (p₂), In₉Se₁₁ (p₃), In₅Se₇ (p₄), and InSe (p₅). The melts of alloys between the peritectica p₂ and p₅ in FIG. 23 tend to be subject to supercooling, in which case crystallization leads to metastable rather than stable states. A diagram of metastable equilibria for cooling rates between 2 and 10 K/min has been published by Godeke et al. (supra).

3. Types of Nonvariant Equilibria

[0226] 3.1 Four-Phase Planes

[0227] In Example I we have already pointed out that the Cu—In—Se system features a variety of different four-phase reactions and critical tie lines. Most important for the phase equilibria of the subsystems are the ten critical tie lines that lie in the plane of the In₂Se₃—Cu₂Se section and extend towards the Se-rich and Cu-rich region. Before discussing the four-phase planes and the critical tie lines of the In—In₂Se₃—Cu₂Se—Cu subsystem we introduce the different categories of these ternary non-variant equilibria by means of schematic drawings. In Example I we have described the constellations that lead to eutectic and peritectic critical tie lines. In this publication we introduce a ternary eutectic four-phase plane, a transition plane, a metatectic critical tie line, and a monotectic critical tie line.

[0228] Ternary systems may exhibit three different types of non-variant equilibria: (i) four-phase equilibria, (ii) non-variant three-phase equilibria, which are denoted as critical tie lines, and (iii) non-variant two-phase equilibria, which correspond, for example, to melting point maxima or melting point minima. Four-phase equilibria are further subdivided into ternary eutectica, ternary peritectica, and transition equilibria. The left hand side of FIG. 24 shows the example of a ternary eutectic four-phase plane, which corresponds to the reaction L⇄α+β+γ. Below the four-phase plane we have indicated the corresponding Scheil reaction scheme. Such a reaction scheme indicates the three-phase equilibria that merge into the four-phase plane from higher temperatures and the three-phase equilibria that emerge from this plane towards lower temperatures. Moreover, the reaction scheme states the reaction equation and the temperature of the respective four-phase plane. At temperatures above the four-phase plane, for example, FIG. 24 depicts three three-phase equilibria: L+α+β, L+α+γ, and L+β+γ. According to the reaction equation, L⇄α+β+γ, the melt L decomposes into three solid phases, α+β+γ. The reaction product, α+β+γ, is indicated once again below the reaction equation.

[0229] In the liquidus projection of FIG. 26 and in the reaction scheme of Table 1 we have designated ternary eutectica by symbols like E_(T1). Binary eutectica and peritectica are denoted by symbols like e₁ and p₁, respectively. The right hand side of FIG. 24 depicts a transition plane U. The three-phase equilibria above and below the four-phase plane are indicated in the reaction scheme, together with the corresponding reaction equation: L+α⇄β+γ. In this example, two three-phase equilibria exist at temperatures above the four-phase plane: L+α+γ and L+α+β. At temperatures below the four-phase plane the system establishes two new three-phase equilibria: α+β+γ and L+β+γ, which can take part in further reactions that occurring at lower temperatures.

[0230] Transition planes carry symbols like U₁ in our diagrams. Four-phase planes that do not involve a liquid phase are denoted by symbols like e_(Tsol1) or u_(sol1), respectively. The former represent ternary eutectica, while the latter stand for transition planes. Eutectic four-phase reactions that involve two liquid phases (L₁⇄L₂+α+β) are commonly known as ternary monotectica. In our nomenclature we have assigned symbols like mo_(T1) to the temperatures at which reactions of this type occur. In the case of four-phase reactions that involve one or two liquid phases one can identify the type of the reaction by microcharacterization of casts or by microcharacterization of specimens that have been cooled down from the melt under the cooling conditions of DTA.

[0231] 3.2 Metatectic and Monotectic Critical Tie Lines

[0232] In Part I we have introduced eutectic and peritectic critical tie lines and showed that they imply the existence of two monovariant three-phase equilibria either below the temperature of the respective critical tie line, or above, or below and above (compare T_(k9)).

[0233] In this section we describe two further types of critical tie lines: metatectic and monotectic critical tie lines. FIG. 25 presents schematic drawings of metatectic critical tie lines. These critical tie lines as well as the phases L₁, L₂, δ_(H) (CuIn₃Se₅), α (CuInSe₂), and γ (the γ phase of the Cu—In binary system) actually occur in the In—In₂Se₃—Cu₂Se—Cu subsystem. As shown in FIG. 25a, there is a critical temperature T_(c11) at which the isotherms of the δ_(H) phase, which participates in the equilibria α+δ_(H) and L₁+δ_(H), touch with each other. This leads to a common (“critical”) tie line T_(k11) representing the equilibrium δ_(H)⇄L₁+α. Thus, the critical temperature T_(c11) represents the temperature at which δ_(H) decomposes into α+L₁. Generally, one d notes such a decomposition of a solid phase (δ_(H)) into another solid phase (α) and a liquid phase (L₁) as “metatectic”. Similar to eutectic and peritectic critical tie lines, three-phase spaces L₁+δ_(H)+α (black in FIG. 25b) exist below the critical temperature T_(c11) of the critical tie line T_(k11). These three-phase spaces are monovariant, and between them the liquid phase L₁ develops into a primary crystallization surface of α.

[0234] At T=T_(c12) the liquidus lines of the two-phase surfaces L₁+L₂ and L₁+α touch with each other. This leads to a common (“critical”) tie line T_(k12), representing the equilibrium L₁⇄L₂+α (FIG. 25c)—at the intersection point of the liquidus lines the, liquid phase L₁ decomposes into L₂+α. This example, where a liquid phase (L₁) decomposes into a solid phase (α) and another liquid phase (L₂), constitutes a case of “monotectic” decomposition. According to FIG. 25d two monotectic three-phase spaces (L₁+L₂+α, shown in black) exist below the critical tie line. This time the liquid phase L₂ develops into a primary crystallization surface of α.

[0235] At T=T_(c13) the liquidus isotherm of L₂+α touches the liquidus isotherm of L₂+γ. According to FIG. 25e this leads to a eutectic critical tie line T_(k13), which represents the equilibrium L₂⇄α+γ: where the liquidus lines touch each other, the liquid phase L₂ decomposes into α+γin a eutectic reaction. The two-phase space L₂+γ originates from the Cu—In boundary system (FIG. 21). FIG. 25f depicts the phase equilibria L₂⇄α+γ that exist below the critical tie line T_(k13).

[0236] In the following we show, by means of several isopleths (FIGS. 28, 29, 30, 31, 32) and the liquidus projection in FIGS. 26 and 27, that the three-phase spaces resulting from the critical tie lines T_(k1) through T_(k13) govern to a large extent the phase equilibria of the entire In—In₂Se₃—Cu₂Se—Cu subsystem.

4. Projection of the Liquidus and the Four-Phase Planes

[0237] 4.1 Liquidus Projection

[0238]FIG. 26 presents the liquidus of the In—In₂Se₃—Cu₂Se—Cu subsystem that we have obtained by DTA and metallography on cast alloys as well as alloys cooled under the conditions of DTA. In FIG. 26b the quasibinary section In₂Se₃—Cu₂Se is shown only between 850 to 1050° C., the relevant temperature interval for the liquidus projection. This temperature interval includes critical tie lines, denoted as T_(k1) through T_(k6). The high-temperature phase H_(T) (Cu₁₃In₃Se₁₁) forms at 947° C. At 923° C., H_(T) and decomposes into (Cu, In)₂Se_(H) and δ_(H), the high-temperature modification of CuIn₃Se₅. δ_(H) crystallizes at 1002° C. with a Cu concentration of 23.5 at. %. The In-rich side of the section features the formation of the corresponding low-temperature phase, δ_(R), by a peritectic reaction at T_(k4), and the formation of the phase γ_(T) at T_(k5).

[0239] In FIG. 26a, fine lines indicate liquidus isotherms, while bold lines represent monovariant eutectic and peritectic equilibria, respectively; the arrow heads at these lines indicate the direction of decreasing temperature. The symbols U, E_(T), and mo_(T) designate transition planes, ternary eutectica, and ternary monotectica—as introduced in section 3.1.

[0240] In total, the In—In₂Se₃—Cu₂Se—Cu subsystem includes twenty-eight four-phase equilibria. Twenty of these involve a liquid phase (sixteen transition planes, two ternary eutectica, two ternary monotectica). Moreover, we have determined thirteen critical tie lines and twenty-one different surfaces of primary crystallization. FIG. 26a reveals that the crystallization surfaces of δ_(H), α_(b1), (Cu, In)₂Se_(H), η, and γ dominate the region of the miscibility gap L₁+L₂.

[0241]FIG. 27d shows the corresponding faces of these four-phase planes—except for the face of the transition plane at U₂. In the ternary system, the liquidus faces of InSe, In₆Se₇, In₉Se₁₁, In₅Se₇, β-In₂Se₃, and δ-In₂Se₃ do not possess a large extension. At this point we need to stress that the temperatures of the four-phase planes involving indium selenides can only be determined during heating; on cooling of In—Se melts with In concentrations between 48 and 54 at. % Se, supercooling introduces metastable equilibria, which extend into the ternary system (FIG. 30).

[0242] The symbols α_(L1) and α_(L2) in FIG. 26b serve to distinguish between two different primary crystallization surfaces of the α phase; these surfaces emerge from the critical tie lines T_(k11) and T_(k12), respectively. In FIG. 26a, the crystallization surface of α_(L1) is bounded by the nonvariant equilibria mo_(T2), U₁₄, U₁₃, T_(k11), U₃, mo_(T1), and T_(k12), respectively. The crystallization surface α_(L2) is rather narrow. It extends parallel to the Cu—In boundary system, from the point labeled L₂ on the In-rich side to the point labeled L₂ on the Cu-rich side. Both these points belong to the liquid phase L₂ involved in the two ternary monotectica at mo_(T1) and mo_(T2), respectively. The position of the two monotectic four-phase planes and the liquid phases L₂ is shown in FIG. 27a. FIGS. 26a and 27 a further reveal the existence of primary crystallization surfaces of In₄Se₃ and (Cu, In)₂Se:In the In-rich corner of the liquidus projection, below the monotectic four-phase plane at mo_(T2), the liquid phase L₂ precipitates In₄Se₃, and on the Cu-rich side, below the monotectic four-phase plane at mo_(T1), L₂ precipitates (Cu, in)₂Se_(H). Owing to the binary and the ternary monotectica, the liquid phase L₁ precipitates In₄Se₃ and (Cu, In)₂Se_(H), too:In₄Se₃ in the field defined by mo₂, p₆, U₁₄, and mo_(T2), and (Cu, In)₂Se_(H) in the field defined by mo₁ mo_(T1), and U₃.

[0243] According to FIGS. 26c and 27 c, the monovariant three-phase equilibria L+δ_(H)+H_(T) and L+H_(T)+(Cu, In)₂Se_(H), which exist below the eutectic critical tie lines T_(k1) and T_(k2), terminate on the transition planes at U₁ and U₁₇, respectively. The four-phase plane at U₁₇ will be further discussed in Part III. As mentioned already in Part I, quenching in water do s not stabilize the high-temperature phase H_(T) down to room temp rature.

[0244] 4.2 Projection of the Four-Phase Planes

[0245]FIGS. 27a and e depict the position of the four-phase planes at U₃, U₄, U₇, U₁₀, U₁₅, U₁₆, U₁₄, U₁₃, mo_(T1), and mo_(T2), and FIG. 27e shows the four-phase planes at E_(T1) and part of the ternary eutectic four-phase plane e_(Tsol2).

[0246] The reaction scheme in Table 1 summarizes the twenty binary and the twenty-eight ternary non-variant equilibria, including the critical tie lines T_(k1) through T_(k13). The critical tie lines T_(k1) through T_(k8) are listed in the column of In₂Se₃—Cu₂Se, and the critical tie lines T_(k9) and T_(k10) in the bottom part of the column In—In₂Se₃—Cu₂Se—Cu. The reactions marked by arrows involve other subsystems of Cu—In—Se; these subsystems will be subject of Example III. On compiling the reaction scheme we tried to order the nonvariant equilibria according to their temperatures. The transition plane with the highest temperature, U₁, occurs at 925° C. and involves the three-phase equilibria that emerge from the critical tie lines T_(k1) (942° C.) and T_(k2) (935° C.). Below the transition plane U₁ the reaction scheme features the three-phase equilibria L+δ_(H)+Cu₂Se_(H) and H_(T)+δ_(H)+(Cu, In)₂Se_(H). The three-phase space H_(T)+δ_(H)+(Cu, In)₂Se_(H).terminates at the critical tie line T_(k3) (923° C.) in the In₂Se₃—Cu₂Se quasibinary section. A corresponding three-phase space emerges from the transition plane at U₁₇ in the Cu₂—In₂Se₃Se subsystem. This three-phase space also terminates at the critical tie line T_(k3) (923° C.). The critical tie line T_(k3) lies exactly in the plane of the In₂Se₃—Cu₂Se section. The temperature of T_(k3) constitutes a minimum with respect to the temperatures U₁=925° C. and U₂=925° C. of the corresponding four-phase planes next to the plane of the In₂Se₃—Cu₂Se section. A similar constellation exists at the critical tie line T_(k7) (785° C.), where the phase δ_(H) decomposes into α and (Cu, In)₂Se_(H) in a eutectoid reaction; the temperature of that critical tie line also constitutes a local minimum with respect to the temperatures of the neighboring reactions (FIG. 29).

[0247] 4.3 Ternary Monotectica

[0248] According to FIGS. 26 and 27, two ternary monotectica exist in the In—In₂Se₃—Cu₂Se—Cu subsystem. The four-phase plane at mo_(T1)=635° C. terminates the following three-phase spaces: L₁+α+(Cu, In)₂Se_(H), L₁+L₂+α, and L₁+L₂+Cu₂Se_(H). According to table 1, the three-phase space L₁+L₂+Cu₂Se_(H) originates from the Cu—Se boundary system (mo₁), while the two other three-phase equilibria emerge at U₃ and T_(k12), respectively. At mo_(T1), the liquid phase L₁ decomposes according to L₁→L₂+α+(Cu, In)₂Se_(H).

[0249] The four-phase plane mo_(T2) (512° C.) joins the following three-phase equilibria: L₁+L₂+In₄Se₃ (from mo₂), L₁+In₄Se₃+α (from U₁₄), and L₁+L₂+α (from T_(k12)). At mo_(T2), the liquid phase L₁ decomposes according to L₁→L₂+α+In₄Se₃. According to FIG. 27 the composition of the liquid phase L₂ lies on the In-rich side for the three-phase space L₂+α+In₄Se₃ and on the Cu-rich side for the three-phase space L₂+α+(Cu, In)₂Se_(H). With decreasing temperature the Cu-rich liquid phase L₂ decomposes into α+β+(Cu, In)₂Se_(H) in a ternary eutectic reaction at E_(T1)=620° C. (Table 1 and FIG. 27e).

[0250] 4.4 The Miscibility Gap L₁+L₂

[0251] According to FIG. 23 the In—Se boundary system possesses a miscibility gap between the liquid phases L₁ and L₂. At 520° C. L₁ decomposes into L₂+In₄Se₃. As apparent from the phase diagram of the In—Se boundary system in FIG. 23, primary crystallization of In₄Se₃ can occur from both, L₁ (p₆ to mo₂) and L₂ (520° C. to e₄). The miscibility gap L₁+L₂ closes at 20 at. % Se and 637° C. In order to investigate how the miscibility gap varies with the Cu concentration we have worked out an isopleth for a constant Se concentration of 20 at. % (FIG. 28).

[0252] On the In-rich side of the isopleth of FIG. 28 one recognizes that increasing the Cu concentration shifts the maximum of the miscibility gap towards higher temperatures. Owing to the high vapor pressure of Se DTA analysis of the miscibility gap was not possible at temperatures above 950° C. In FIG. 28, therefore, the data above 950° C. were extrapolated from the low-temperature data. The extrapolated isotherms of the miscibility gap towards the Cu—Se boundary system are depicted in FIG. 26a.

5. Isopleths

[0253] 5.1 Phase-Equilibria with 20 at. % Se

[0254] The isopleth at 20 at. % Se in FIG. 28 reveals numerous intersections with four-phase planes and critical tie lines. Part of these have already been described when discussing Table 1 and FIGS. 25, 26, and 27. The monotectic and eutectic critical tie lines T_(k12) and T_(k13) and the ternary monotectica at mo_(T1) and mo_(T2). Here one can clearly recognize the three-phase spaces L₁+L₂+α and L₂+α+γ, which form below the critical tie lines. According to FIG. 28, the critical tie lines T_(k12) and T_(k13) and the ternary monotectica at mo_(T1) and mo_(T2) substantially influence the phase equilibria of the In—In₂Se₃—Cu₂Se—Cu subsystem.

[0255] The isopleth at 20 at. % Se in FIG. 28 further shows that the α phase (CuInSe₂), the phase that is of particular importance for photovoltaic applications, establishes equilibria with the Cu—In phases η, δ, and β, and even with the solid solution α_(Cu). According to Table 1, the four-phase plane intersected at e_(Tsol3)=572° C. marks the ternary eutectoid decomposition of the β phase into α+δ+α_(Cu). In the Cu—In boundary system (FIG. 21) β forms by a peritectic reaction at p₉=710° C. and decomposes in a eutectoid reaction at e_(sol3)=574° C. Between the four-phase planes at U₁₀, U₇, and U_(sol2), FIG. 28 exhibits the two-phase spaces α+γ and α+δ.

[0256] In the present work, we treat the phase set {η_(A), η_(A′), η_(B), C, η_(h)}, which occurs in the Cu—In boundary system near the composition Cu₃₆In₈₄, as a single phase and denote it as η. The four-phase planes at U₁₅=506° C., U₁₆=308° C., and E_(T2)=153° C. lead to the formation of the three-phase equilibria In₄Se₃+α+η, In₄Se₃+Cu₁₁In₉+η, and In+Cu₁₁In₉+In₄Se₃. The latter remain stable down to room temperature. In FIG. 27a the four-phase planes at U₁₅ and U₁₆ cover rather large areas. Beginning at the in corner these areas extend up to 50 at. % Se and 64 at. % Cu.

[0257] Furthermore, FIG. 28 demonstrates the increasing the In concentration lowers the temperature of the monotectic reaction L₁→L₂+(Cu, In)₂Se_(H), which occurs in the Cu—Se boundary system at mo₁=1000° C., to the temperature mo_(T1)=653° C. Similarly, increasing the In concentration lowers the temperature of the eutectic reaction L₂ (Cu, In)₂Se_(H)+α_(Cu), which occurs at e₁=1063° C., to U₄=708° C. At U_(sol1)=618° C., only 2 K below the four-phase plane at E_(T1), we observe a transition plane that does not involve a liquid phase. This four-phase reaction leads to the three-phase space α+α_(Cu)+(Cu, In)₂Se_(H). The thermal effects at 134° C. indicate the transformation from (Cu, In)₂Se_(H) into (Cu, In)₂Se_(R).

[0258] 5.2 Phase Equilibria with 40 at. % Se

[0259] The isopleth In₆₀Se₄₀—Cu₆₀Se₄₀ of FIG. 29 extends from 50 to 60 at. % Cu into the more Se-rich subsystem. The tie lines of the phase equilibria at 50 at. % Cu lie exactly in the plane of the In₂Se₃—Cu₂Se section. Accordingly, the plane of the isopleth of FIG. 29 intersects with the critical tie lines T_(k1) (L⇄H_(T)+Cu₂Se_(H)), T_(k3) (H_(T)⇄δ_(H)+Cu₂Se_(H)), and T_(k7) (δ_(H)⇄α+Cu₂Se_(H)). As described before in section 4.3, the phases δ_(H) and h_(T) decompose by eutectic reactions at 785° C. and 923° C., respectively. One realizes that towards lower temperatures the two three-phase equilibria δ_(H)+α+(Cu, In)₂Se_(H) of T_(k7) (785° C., below U₃ and U₁₉) and also th three-phase spaces H_(t)+δ_(h)+(Cu, In)₂Se_(H) (below U₁ and U₁₇) each terminat in the critical tie line T_(k3) at 923° C. Note that we have not labeled the corresponding three-phase spaces in FIG. 29 because they are very small.

[0260] In total, the plane of the In₆₀Se₄₀—Cu₆₀Se₄₀ isopleth in FIG. 29 intersects with four liquidus surfaces and ten transition planes at U₁, U₁₇, U₁₉, U₃, U₁₀, U₇, U₁₄, U₁₅, U₁₆, and U₂₀. The four-phase planes at mo_(T3), U₁₉, and U₂₀, whose surfaces intersect with the Cu-rich side of the plane of the In₆₀Se₄₀—Cu₆₀Se₄₀ isopleth, will be further discussed in Example III. The enlargement of FIG. 29b reproduces the phase equilibria below T_(k12) and T_(k13) in the composition range between 30 and 40 at. % Cu. The four-phase planes that intersect with the plane of this figure are the same we have already discussed with FIG. 28.

[0261] 5.3 The In₅₀Ser₅₀—Cu₅₀Se₅₀ Isopleth

[0262] The In₅₀Se₅₀—Cu₅₀Se₅₀ isopleth, shown in FIG. 30, links phase equilibria of subsystem II (In—In₂Se₃—Cu₂Se—Cu) and subsystem III (In₂Se₃—Se—Cu₂Se). This isopleth shows the extension of homogeneous δ_(H) and a as a function of the Cu concentration. The plane of the isopleth extends exactly along the inner tie line (InSe+α) of the transition plane at U₁₃ (597° C., L+δ_(H)⇄InSe+α). The two-phase region InSe+α borders directly to the region of homogeneous α and only exhibits a weak dependence on the temperature. In Example I we have shown micrographs of InSe precipitates in α (FIGS. 13 and 20). On the Cu-rich side, the α phase (Cu, In)₂Se_(H) can precipitate, however only in a narrow interval of compositions. The In₅₀Se₅₀—Cu₅₀Se₅₀ isopleth visualizes the liquidus surface of the phase δ_(H), which exhibits a maximum, and the point where δ_(H) transforms to α at 818° C. On the InSe side of the isopleth the DTA effects documented in FIG. 30 exhibit significant differences depending on whether recorded during heating or during cooling. The effects that we have registered near 500° C. during cooling down from the liquid phase do not reflect equilibrium states but metastable states. The DTA effects at 609° C., 607° C., and 597° C. are only observed on heating the respective alloys, after equilibrating them at low temperature. For the latter purpose, the specimens for the DTA analysis were annealed at 500° C. for 14 d. The above three temperatures of the DTA effects observed during heating correspond to following temperatures of transition planes: U₁₁ (L+In₆Se₇⇄InSe+δ_(R)), U₁₂ (L+δ_(R)⇄InSe+δ_(H), and U) ₁₃ (L+δ_(H)⇄InSe+α).

[0263] 5.4 The Isopleths CuInSe₂—Cu₅₀In₅₀ and CuInSe₂—Cu₇₀In₃₀

[0264] The two isopleths in FIGS. 31 and 32 reveal the extension of the δ_(H) and the a liquidus surfaces as a function of the In concentration. Even though the planes of both, FIG. 31 and FIG. 32 include some critical tie lines, the two isopleths do not constitute quasibinary sections: In FIG. 31 only the critical tie lines T_(k12) (673° C.) and T_(k13) (663° C.) lie in the plane of the section. The intersection of this plane with the three-phase equilibria L₁+α+δ_(H) and γ+δ+α, however, results in monovariant equilibria. Therefore, the tie lines of the two-phase equilibria L₁+δ_(H) and L₁+α make angles with the plane of the isopleth. At T_(k12) (673° C.) the liquid phase L₁ decomposes into α+L₂ by a monotectic reaction. On further cooling, the liquid phase L₂, deficient in Se, decomposes into α+γ by a eutectic reaction. The DTA effects right above 600° C. go back to the polymorphic transformation from γ to δ in the Cu—In boundary system (FIG. 21).

[0265]FIG. 33 presents experimental evidence for the above reactions. After cooling down from the melt at 5 K/min, Cu_(48.0)In_(14.0)Se_(38.0) features a large fraction of primary α (gray) and, along the grain boundaries, a eutectic microstructure that belongs to α+γ/δ. Owing to the monotectic reaction L₁⇄α+L₂, the eutectic reaction L₁⇄α+γ, and the transformation γ→δ one can only interpret this micrograph in conjunction with DTA data.

[0266] DTA of Cu_(48.0)In_(14.0)Se_(38.0) showed five effects on cooling and four effects on heating. In FIG. 32, only the metatectic critical tie line T_(k11) (812° C.) falls into the plane of the isopleth. The constellation that leads to this critical tie line is sketched in FIGS. 25a and 25 b and explained in section 3.2. Below 812° C., FIG. 32 displays a liquidus surface of a, which corresponds to α_(L1) in FIG. 26a. The micrograph of FIG. 34 reveals the microstructure of Cu_(26.0)In_(26.0)Se_(48.0) at 700° C. and demonstrates the existence of the two-phase region L₁+α. In FIG. 34a the fine-grained globular regions correspond to the liquid phase L₁. The matrix, which contains cracks, consists of α. On quenching, the liquid phase L₁ first decomposes into α+L₂ by a monotectic reaction. On further cooling, L₂, which is In-rich, precipitates the α phase (bright regions in FIG. 34b).

[0267]FIG. 35 shows another example of a microstructure that has formed by monotectic decomposition of the liquid phase L₁. The composition of this alloy, Cu_(33.0)In_(33.0)Se_(34.0), corresponds exactly to the composition of the monotectic reaction; this becomes clear from FIG. 32 and the fractions of the respective phases predicted by the phase diagram. On cooling, the liquid phase L₁ decomposes almost completely into α and L₂. On further cooling, the liquid phase L₂, which is In-rich, precipitates the phase η. The latter appears as bright, globular component in the microstructure of FIG. 35. The dark phase, In₄Se₃, which decorates the grain boundaries in FIG. 35b, indicates that a small amount of liquid phase remained during crystallization and solidified to In₄Se₃ via the transition plane at U₁₅ (506° C.). In order to distinguish between the phases δ and η that appear bright in FIGS. 34 and 35, respectively, we have carried out XEDS and XRD.

6. Isothermal Section at 500° C.

[0268]FIG. 36 presents an isothermal section of the phase diagram at 500° C. The shaded areas indicate single-phase regions. At 500° C. all phases are solid, except for the liquid phase L₂ in the In-rich corner. The three-phase equilibria L₂+In₄Se₃+η and In₄S₃+α+η were established below the transition plane at U₁₅, the largest transition plane of the In—In₂Se₃—Cu₂Se—Cu subsystem. The two-phase equilibrium α+δ in FIG. 36 indicates the plane of the CuInSe₂—Cu₇₀In₃₀ isopleth (FIG. 31).

[0269] The α phase, CuInSe₂, participates in eight two-phase and three-phase equilibria of the In—In₂Se₃—Cu₂Se—Cu subsystem. Explicitly, α establishes equilibria with In₄Se₃, η, Cu₂Se_(H), δ, α_(Cu), InSe, δ_(H), and δ_(R). The three-phase equilibria α+α_(Cu)+Cu₂Se_(H), α+η+δ, and α+δ+α_(Cu) follow from the four-phase reactions at U₁₁ (618° C.), U_(sol2) (612° C.), and E_(Tsol3) (572° C.). The region between In₄Se₃—α (CuInSe₂)—In₂Se₃ has been described in Example I (FIG. 16). While the high-temperature phase δ_(H) cannot be quenched-in at compositions within the plane of the quasibinary section Cu₂Se—In₂Se₃, it can be quenched-in at somewhat more In-rich compositions next to the plane of the section.

7. Microstructure at 500° C.

[0270]FIGS. 37, 38, 39 and 40 present micrographs of several different alloys after annealing at 500° C. for four to five days and subsequent quenching in water. For metallographic etching of polished surfaces we employed a solution of 10% ferri-nitrate. Particularly for Cu-rich alloys this solution proved to reveal the different phases with good contrast. For all other metallographic investigations we obtained sufficient SEM contrast without wet chemical etching. In some cases we could further improve the LM contrast by employing polarized light.

[0271]FIG. 37a reproduces the microstructure of Cu_(48.0)In_(14.0)Se_(38.0). This micrograph, which was obtained without wet etching, indicates the sequence in which the individual phases have formed during solidification. The coarse eutectic microstructure reveals that at first part of the liquid phase has precipitated the phases α/δ (gray) and (Cu, In)₂Se_(H) (dark). Then, as solidification progresses, the composition of the liquid phase changes, such that the residual liquid phase L₁ finally decomposes into L₁+α+Cu₂Se_(H). Since the specimen of FIG. 37a has been annealed at 500° C., the microstructure that formed by the ternary eutectic reactions dominates the micrograph and documents the phase equilibrium α_(Cu)+α+Cu₂Se_(H). The enlarged section in FIG. 37 allows to distinguish more clearly between α_(Cu) (dark), Cu₂Se_(H) (dark-gray), and α (light-gray).

[0272]FIG. 38 shows the microstructure of Cu_(28.0)In_(33.4)Se_(38.6) and confirms the existence of the three-phase equilibrium In₄Se₃+η+α below the transition plane at U₁₅ (506° C.). In this micrographs, a appears dark, η appears bright, and In₄Se₃ shows up with a gray level in-between.

[0273]FIG. 39 documents the two-phase equilibrium between α and δ. In polarized light, which we employed when recording this micrograph, the δ phase features a weak transition from light-gray to dark-gray. The α phase, which appears dark, has only a small volume fraction and consists of globular particles. In order to interpret the micrograph of FIG. 39 it is helpful to consult the CuInSe₂—Cu₇₀In₃₀ isopleth of FIG. 31. The latter shows that a forms from the liquid phase L₂ via the critical tie line T_(k13) (663° C.), while δ goes back to the transformation γ→δ at 605° C.

[0274]FIG. 40 presents evidence for the existence of the three-phase space α_(Cu)+α+δ below the eutectoid four-phase plane at e_(Tsol3) (572° C.). After the etching applied here, α_(Cu) appears bright, δ light-gray, and α black.

[0275] With alloy compositions of 50 at. % Cu and 20 to 30 at. % Se, cooling down from the melt leads to separation of the liquid phase into the liquid phase L₁ and the liquid phase L₂. Since L₁ is Se-rich and L₂ is Cu-rich, L₁ predominantly solidifies to α+L₂+Cu₂Se_(H/R) in a ternary monotectic reaction at mo_(T1), while L₂ mainly solidifies via the ternary eutectic four-phase plane at E_(T1). If one fractures a specimen with a composition in the relevant range, already visual inspection of the cleavage surface reveals particles that originate from the solidification of the two different liquid phases. Metallographic etching of such alloys exhibits globular regions indicating for the decomposition of L₂.

[0276]FIG. 41 shows an example for such a microstructure. FIG. 41 a reveals the microstructure of Cu_(48.0)In_(22.0)Se_(30.0) after cooling down from 1000° C. to room temperature at 5 K/min. The bright regions indicate where L₁, the Serich liquid phase, has solidified, while the dark, globular regions originate from the solidification of L₂, the Cu-rich liquid phase. The globular regions consist of several phases, including the ac, solid solution, which has formed by primary precipitation from the liquid phase L₂ (FIG. 41b).

[0277] If one cools down alloys with a compositions near the monotectic point at mo_(T1) from the liquid state at 1020° C. to 600° C. at 2 K/min, fine Cu whiskers form at the surface of the specimen (FIGS. 42a and b). These Cu whiskers have grown out from the black holes one recognizes in the background of FIG. 23b and probably form owing to the contraction that takes place during the slow cooling of the residual liquid phase L₂, which is Cu-rich.

8. Conclusion

[0278] In this Part we have described the phase equilibria of In—In₂Se₃—Cu₂Se—Cu, subsystem II of the Cu—In—Se system, by liquidus projections, isopleths, and isothermal sections of the ternary phase diagram. We have found that the miscibility gaps in the In-rich regions of the boundary systems In—Se and Cu—Se, respectively, merge continuously. Eutectic, metatectic, and monotectic critical tie line play an important role for the phase equilibria of the In—In₂Se₃—Cu₂Se—Cu subsystem. In particular, metatectic and monotectic critical tie lines lead to the existence of two primary crystallization surfaces for the α phase (CuInSe₂), which constitutes the most important phase for photovoltaic applications.

Part III 1. General

[0279] Part III deals with the remaining subsystem III, In₂Se₃—Se—Cu₂Se, and extends the discussion to the entire composition triangle. We discuss this subsystem by means of a liquidus projection, several isothermal sections and several isopleths. Furthermore, we supplement the reaction scheme of Part II by two further reaction schemes for the regions In₂Se₃—Se—CuInSe₂ and Cu₂Se—Se—CuInSe₂ (IIIa and IIIb in FIG. 1).

[0280] Subsequently, we discuss the phase equilibria of the Cu—In—Se system as a whole. For this purpose, we show its liquidus projection, three isothermal sections, and two isopleths, covering the entire composition triangle.

[0281] The fabrication of the alloys and the experimental methods we used for characterization are described in Part I.

2. Phase Equilibria of the In₂Se₃—Se—Cu₂Se Subsystem

[0282] 2.1 Liquidus Projection

[0283]FIG. 43 presents the liquidus of the Cu—In—Se system, as determined by DTA (differential thermal analysis) and metallography of cast alloys and DTA specimens cooled down from the melt. The symbols p, e, and mo in FIG. 43a denote binary peritectica, eutectica, and monotectica, respectively. The fine lines represent liquidus isotherms. Bold lines with arrows, in contrast, represent eutectic, peritectic or monotectic reactions. The arrows always indicate the direction of decreasing temperature. The symbols U, E_(T), and mo_(T) designate transition planes, ternary eutectica and ternary monotectica, respectively. Thus, these symbols indicate four-phase reactions involving a liquid phase. The dotted lines marked with symbols T_(k) in FIGS. 43a, 43 e, and 43 f indicate critical tie lines. In Parts I and II we have explained eutectic, peritectic, metatectic, and monotectic critical tie lines as well as two types of four-phase planes (transition planes and ternary eutectica) by means of schematic drawings.

[0284] The dominant features in the liquidus projection of FIG. 43 are the miscibility gap of the liquid phases L₁+L₂ and the primary crystallization surface of the phase δ_(H). The melting point maximum of δ_(H) lies at 1002° C. and is marked by a dot in FIG. 43a. While the maximum resides within the plane of the In₂Se₃—Cu₂Se isopleth, it corresponds to a Cu content of 23.5 at. % and thus does not exactly coincide with the stoichiometry CuInSe₂ of the α phase.

[0285] The phase H_(T) (Cu₁₃In₃Se₁₁), which also crystallizes via a melting point maximum within the plane of the In₂Se₃—Cu₂Se isopleth, possesses the smallest liquidus surface. Owing to the binary monotectica mo₁, mo₂, and mo₃ as well as the ternary monotectica mo_(T1), mo_(T2) and mo_(T3) the phases Cu₂Se_(H) and In₄Se₃ have two surfaces of primary crystallization, which lie parallel to the boundary systems Cu—Se and In—Se, respectively, in FIGS. 43a and 43 c.

[0286] The α phase (CuInSe₂) possesses two surfaces of primary precipitation from the liquid phase in the In₂Se₃—Se—Cu₂Se subsystem. FIG. 43a shows these surfaces as α_(L1) and α_(L2). As explained in Part II, these liquidus surfaces form via the metatectic critical tie line T_(k11) and the monotectic critical tie line T₁₂. The Se-rich side of the liquidus projection in FIGS. 43a, 43 b, and 43 c exhibits two further liquidus surfaces of a that we have observed: α_(L3) and α_(L4). The liquidus surface α_(L4) results from the metatectic critical tie line T_(k15) and extends to the Se corner. The liquidus surface α_(L3), in contrast, lies parall I to the Cu—Se boundary system at about 50 at. % Se and originates from the four-phase reaction U₁₈ (Table 2 and Section 2.3).

[0287] In FIG. 43a the miscibility gap L₃+L₄, which originates from the Cu—Se boundary system, terminates at a critical point at T_(k14). At this critical point the liquidus isotherms of the two-phase region L+δ_(H) touch with the critical point of the miscibility gap L₃+L₄. Note that this point corresponds to a saddle point of the liquidus. FIGS. 44a and 44 b present schematic drawings of this situation, which we explain further in the following.

[0288] In FIG. 44a the critical point of the miscibility gap L₃+L₄ meets the liquidus isotherm of the two-phase space L₃+δ_(H) or L₄+δ_(H), respectively, at T_(k14); at T_(k14) the liquid phases L₃ and L₄ have the same composition. The dotted line that emerges from this point marks a ‘special’ critical tie line, along which the phases L₃=L₄ establish an equilibrium with δ_(H). Below the critical temperature of T_(k14), the system develops a single three-phase space, L₃+L₄+δ_(H), which is shown in black in FIG. 44b. On reducing the temperature this three-phase space widens, while the liquid phase L₄ becomes richer in Se and the liquid phase L₃ becomes more and more deficient in Se. FIG. 44c demonstrates the extension of the three-phase space with decreasing temperature in a three-dimensional schematic drawing. The critical tie lines T_(k14), T_(k15), and T_(k16) initiate rather complicated reaction schemes within the In₂Se₃—Se—Cu₂Se subsystem. The critical tie line T_(k16) is of the same type as T_(k14).

[0289] In the entire Cu—In—Se system we have determined twenty-nine different liquidus surfaces, eighteen critical tie lines, and 40 four-phase equilibria. In order to simplify the discussion, we have subdivided the In₂Se₃—Se—Cu₂Se subsystem into the regions CuInSe₂—Se—Cu₂Se and In₂Se₃—Se—CuInSe₂ (IIIa and IIIb, compare FIG. 1). The boundary between these two regions coincides with the metatectic critical tie line T_(k15). In the following, we first discuss the isopleth along this separation line and then turn to the regions IIIa and IIIb.

[0290] 2.2 The Se—CuInSe₂ Isopleth

[0291]FIG. 45 shows the isopleth Se—CuInSe₂, in other words the vertical section along the metatectic critical tie line T_(k15). In this representation one clearly recognizes the melting point maximum of the phase δ_(H) and the temperature maximum of the reaction from δ_(H) to α (CuInSe₂). At 805° C. and along the critical tie line T_(k15) the high-temperature phase δ_(H) decomposes into the Se-rich liquid phase L₄ and α. This reaction represents a kind of eutectic crystallization and is denoted as “metatectic”. In Part II we have introduced metatectic critical tie lines with the example of the critical tie line T_(k11). Below T_(k15) and above 220.5° C., FIG. 45 indicates a two-phase equilibrium between the liquid phase L₄ and α. Above 805° C. the Se—CuInSe₂ isopleth is no longer a quasibinary one because the intersection between the maxima and the plane of the isopleth does not occur exactly at the composition Cu_(25.0)In_(25.0)Se_(50.0). As mentioned before, both maxima fall into the plane of the In₂Se₃—Cu₂Se isopleth and occur at 23.5 at. % Cu and 24.8 at. % Cu, respectively. Thus, the tie lines of the two-phase region L+δ_(H) do not lie exactly within the plane of the Se—CuInSe₂ isopleth.

[0292] 2.3 CuInSe₂—Se—Cu₂Se

[0293] Table 2 describes the entire reaction scheme of the CuInSe₂—Se—Cu₂Se region (IIIb in FIG. 1). The column entitled In₂Se₃—Cu₂Se lists the relevant critical tie lines of this region: T_(k1), T_(k2), T_(k3), and T_(k7). The lines marked by arrows or “I” originate from or lead to the subsystems In—In₂Se₃—Cu₂Se—Cu (critical tie lines T_(k1), T_(k2), T_(k3), and T_(k7)) and In₂Se₃—Se—Cu₂Se (critical tie lines T_(k15), T_(k17)). In the region of CuInSe₂—Se—Cu₂Se Table 2 lists five transition equilibria (U₁₇, U₁₈, U₁₉, U₂₀, U₂₁), one ternary monotecticum (mo_(T3)), and one ternary eutecticum (E_(T3)).

[0294] The Cu-rich side of the In₂Se₃—Cu₂Se isopleth features crystallization of the phase H_(T) (Cu₁₃In₃Se₁₁) via a melting point maximum at 947° C. (FIGS. 43a and 43 f). H_(T) is a high-temperature phase that we could not stabilize at room temperature. At 923DC H_(T) decomposes into α+(Cu, In)₂Se by a eutectoid reaction. According to FIG. 43f the liquidus surface of H_(T) is bounded by the critical tie lines at T_(k2) and T_(k1) and by the points U₁ and U₁₇.

[0295] The transition plane U₁ belongs to the In—In₂Se₃—Cu₂Se—Cu subsystem and was discussed in Part II. Below the transition plane U₁₇ we observe two three-phase equilibria: L₃+δ_(h)+(Cu, In)₂Se_(H) and δ_(h)+H_(T)+(Cu, In)₂Se_(H). The latter equilibrium also exists below the transition plane U₁ at 925° C. in the In—In₂Se₃—Cu₂Se—Cu subsystem. Table 2 further indicates that both these three-phase equilibria terminate in the minimum at the critical tie line T_(k3) (923° C.).

[0296] For the phase equilibria of the CuInSe₂—Se—Cu₂Se region, the critical tie line T_(k14) (835° C.) plays a key role. This is because the critical point of the miscibility gap L₃+L₄ of the Cu—Se boundary system falls onto this critical tie line. According to FIG. 44b the critical tie line at T_(k14) brings about the three-phase space L₃+L₄+δ_(H). With decreasing temperature this space extends and then terminates on the four-phase plane U₁₈ (L₄+δ_(H)⇄α+L₃) at 803° C., together with the three-phase space δ_(H)+L₄+α. According to FIGS. 43a, 43 b, and 43 c, the liquid phase L₄ below the four-phase plane U₁₈ becomes more and more Se-rich, participates in the transition planes U₂₀ (376° C.) and U₂₁ (338° C.), and ends at E_(T3) (220° C.).

[0297] The liquid phase L₃ at 803° C. becomes richer in Cu when the temperature decreases, takes part in the four-phase reaction U₁₉ at 800° C., and ends at the ternary monotecticum mo₃ (522° C.). The liquidus projection of FIG. 43a displays a small liquidus surface of the α phase (CuInSe₂) below the four-phase reaction U₁₉. in FIG. 43a this surface is designated as α_(L3), and it is bounded by L₃ (U₁₈), U₁₉, and mo_(T3).

[0298] Depending on the position of the isopleths within the CuInSe₂—Se—Cu₂Se region, these vertical sections may intersect with the four-phase planes listed in Table 2. By means of the isopleths shown in FIGS. 46, 47, and 48 we now discuss the nonvariant equilibria of the region CuInSe₂—Se—Cu₂Se.

[0299] The isopleth In_(20.0)Se_(80.0)—Cu_(20.0)Se_(80.0) in FIG. 46 exhibits substantial differences between the phase equilibria between the left half (0 to 10 at. % Cu) and the right half (10 to 20 at. % Cu). In the region from 10 to 20 at. % Cu the isopleth intersects with the four-phase planes U₁₈, mo_(T3), U₂₀, U₂₁, and E_(t3) as given in Table 2. As we have mentioned before, the CuInSe₂—Se isopleth coincides with the boundary between the regions CuInSe₂—Se—Cu₂Se and In₂Se₃—Se—CuInSe₂.

[0300] The isopleth In₂Se₃—Cu_(40.0)Se_(60.0) in FIG. 47 features intersection with the same four-phase planes as in FIG. 46 in the region from 20 to 40 at. % Cu. Again, this isopleth exhibits substantial differences between the phase equilibria in the left half (0 to 20 at. % Cu) and the right half (20 to 40 at. % Cu). The plane of the isopleth intersects with four-phase plane U₂₁ such that it includes the two-phase equilibrium α+CuIn₂ as well as the three-phase equilibria L₄+α+CuSe₂ and α+CuSe₂+γ-CuSe, which are established below 338° C. The phases γ-CuSe and CuSe₂ form in the Cu—Se boundary system via the peritectic reactions p₁₀ and p₁₁ at 377° C. and 342° C., respectively. The microstructure of Cu_(30.0)In_(10.0)Se_(60.0) in FIGS. 48a through 48 b confirm the existence of the four-phase reactions U₂₀ and U₂₁. The SEM image of FIG. 48a reveals the microstructure of the three-phase space L₄ (gray)+α(bright)+CuSe_(H) (dark) between mo_(T3) (522° C.) and U₂₀ (376° C.). The Se-rich liquid phase L₄ (gray) solidified with a fine grain size during the water quench. In the LM color micrograph of FIG. 48b the fine grained regions of L₄ appear gray while α and CuSe_(H) show up with a dark brown and a light brown hue, respectively. Tempering the same alloy for two days at 320° C. yields the microstructure of FIG. 49. The SEM image in FIG. 49a reveals the two-phase equilibrium α (bright)+CuSe₂ (dark). The LM bright-field micrograph of FIG. 49b, which has been recorded under polarized light, additionally reveals the fine grains of the CuSe₂ phase. The composition Cu₃₀In₁₀Se₆₀ falls onto the line that connects α with CuSe₂ and coincides with the inner tie line of the transition plane U₂₁ (L₄+γ-CuSe α+CuSe₂).

[0301] The isopleth In_(50.0)Se_(50.0)—Cu_(50.0)Se_(50.0) in FIG. 30 features phase equilibria of subsystem II (In—In₂Se₃—Cu₂Se) and the region IIIb (CuInSe₂—Se—Cu₂Se) of subsystem III. The equilibria between 0 and 25 at. % Cu were already described in Example II. FIG. 30 visualizes the intersection of the isopleth with the liquidus surface of the phase δ_(H) and the temperature maximum of the solid state reaction from δ_(H) to α. Between 25 and 50 at. % Cu on recognizes the intersection with the four-phase planes U₁₉, mo_(T3), and U₂₀, and between 800° C. and 522° C. the diagram reveals part of the two-phase space L₃+α. The liquidus line between 45 and 49 at. % Cu belongs to the liquidus surface L₃ (α).

[0302] 2.4 In₂Se₃—Se—CuInSe₂

[0303] In this section we describe the region In₂Se₃—Se—CuInSe₂ of subsystem III (region IIIb in FIG. 1) by means of the liquidus projection (FIGS. 43a, 43 b and 43 e), the isopleths with 80 and 60 at. % Se (FIGS. 47 and 48), and the reaction scheme of Table 3.

[0304] In FIG. 43a one end of the critical tie line T_(k16) is marked by a dot. The corresponding point terminates the miscibility gap of the liquid phases L₃ and L₄, and at this point the critical point of the liquid phases L₃ and L₄ touches the liquidus isotherm L+γT. Along the critical tie line formed in this way the phases L₃=L₄ establish an equilibrium with γ_(T) (FIG. 43e). Below T_(k1), this equilibrium develops into the three-phase space L₃+L₄+γ_(T) (Table 3).

[0305] On cooling, the liquid phase L₄ of the three-phase space L₃+L₄+γ_(T) becomes richer in Se, takes part in the four-phase reactions U₂₂, U₂₃, and U₂₄, and vanishes at E_(T4) (219° C.). In contrast to this behavior, the liquid phase L₃ becomes richer in In with decreasing temperature and finally decomposes into L₄+β₁+γ_(T) by the monotectic reaction mo_(T4) (745° C.). The symbol δ₁, which was introduced in Table 3 denotes the high-temperature phase δ-In₂Se₃. The column entitled In₂Se₃—CuInSe₂ of Table 3 contains the critical tie lines T_(k4), T_(k5), T_(k6), T_(k8), and T_(k9) on the In-rich side of the In₂Se₃—Cu₂Se isopleth (subsystem I). The symbol γ_(T) denotes the ternary phase (CuIn₅Se₈), which forms within this quasibinary section at 900° C.

[0306] The column entitled In₂Se₃—Se of Table 3 lists the non-variant equilibria mo₄ (750° C.), e_(sol7) (745° C.), e₅ (221° C.), and p_(sol1) (201° C.) of the In—Se boundary system.

[0307] The transition plane U₂₂ (L₄+δ_(H)⇄α+δ_(R)) terminates the three-phase equilibria that emerge from the critical tie lines T_(k4) (L+δ_(H)+δ_(R)) and T_(k15) (δ_(H)+α+L₄), and two new three-phase equilibria are established below this plane: δ_(R)+α+L₄ and δ_(H)+α+δ_(R) (δ_(H) denotes the high-temperature modification and δ_(R) the room temperature modification of the phase with the stoichiometry CuIn₃Se₅). The three-phase space and δ_(H)+α+δ_(R) shifts towards the In₂Se₃—Cu₂Se quasibinary section and then becomes nonvariant when merging into the critical tie line T_(k9) (520° C.). On further decreasing the temperature, the equilibrium shifts into the subsystem II (In—In₂Se₃—Cu₂Se—Cu) and then terminates at the four-phase plane e_(Tsol4).

[0308] Only in this subsystem it is possible to stabilize δ_(H) at room temperature by quenching in water (Section 3, isothermal sections). The plane mo_(T4) constitutes a ternary monotectic four-phase plane, while U₂₃ is a transition plane. The isopleths in FIGS. 46 and 47 exhibit intersections with the four-phase planes U₂₂, mo_(T4), and U₂₃. Between 743° C. and the temperatures of E_(T5) (220° C.), E_(T4) (219° C.), and U₂₄ (220° C.) the isopleths only display the three-phase spaces L₄+γ_(T)+γ-In₂Se₃, L₄+γ_(T)+δ_(R), and L₄+α+δ_(r). Table 3 indicates the four-phase reactions that generate these three-phase spaces (note that γ-In₂Se₃ is abbreviated by γ2/3), and the schematic drawing of FIG. 43b shows the position of the non-variant equilibria E_(T5), E_(T4), and U₂₄. We have not experimentally determined, however, the critical tie lines at T_(k15) and T_(k17) and the course of the reaction p_(sol1). On the In-rich side of the boundary system γ-In₂Se₃ can precipitate directly from the liquid phase L₄, owing to the binary monotecticum mo₄ and the ternary monotecticum mo_(T4) (FIGS. 43a and 43 b).

3. Discussion of the Entire Cu—In—Se System

[0309] 3.1 Isothermal Section at 900° C.

[0310]FIG. 50 presents an isothermal section of the entire concentration angle at 900° C. At this temperature a broad range of compositions exists as a liquid phase. Along the line that connects In₂Se₃ with Cu₂Se one recognizes the regions of homogeneous δ_(H) and homogeneous (Cu, In)₂Se_(H), shown as shaded fields. The two three-phase equilibria L+δ_(H)+(Cu, In)₂Se_(H) result from the transition planes U₁ (925° C.) and U₁₇ (925° C.). The small ribbon between the before-mentioned three-phase equilibria originates from the eutectoid decomposition of the high-temperature phase H_(T) into δ_(H)+(Cu, In)₂Se_(H) at T_(k3)=923° C.

[0311] In the In-rich and Se-rich region of the isothermal section one can see the critical tie line at T_(k5)=900° C. (L+δ_(H)⇄γ_(T)), which coincides with the plane of the In₂Se₃—Cu₂Se vertical section. The two-phase region L+δ_(H) features radial tie lines around the field of homogeneous δ_(H). These tie lines terminate at the three-phase equilibria L+δ_(H)+Cu₂Se and L+δ_(H)+δ_(R). The two-phase region δ_(H)+Cu₂Se_(H) in-between is very small and extends exactly parallel to the plane of the In₂Se₃—Cu₂Se quasibinary section.

[0312] Adding In renders the binary reactions mo₁ (L₁⇄L₂+Cu₂Se_(H)) at 1100° C. and e₁ (L₂⇄α_(Cu)+Cu₂Se_(H)) at 1065° C. of the Cu—Se boundary mono-variant on adding In and shifts them to lower temperatures. These equilibria end at 653° C. at mo_(T1) (L₁⇄L₂+α+(Cu, In)₂Se_(H)) and at U₄ (L₂+α_(Cu)⇄(Cu, In)₂Se_(H)+β), respectively. In the Cu-rich corner the plane of the isothermal section intersects with the two three-phase spaces L₁+L₂+Cu₂Se_(H) and L₂+α_(Cu)+Cu₂Se_(H). The tie lines of the liquid phase miscibility gap L₁+L₂ extend from the three-phase space L₁+L₂+(Cu, In)₂Se_(H) and terminate in the critical point of the miscibility gap at about 25 at. % Cu and 20 at. % Se. The course of the L₁+L₂ miscibility gap towards high temperatures was obtained by extrapolating the low-temperature data (Example II). In contrast to the miscibility gap L₁+L₂, the miscibility gap L₃+L₄ on the Se-rich side of the Cu—Se boundary system only has a small extension (5 at. % In) at 900° C.

[0313] 3.2 Isothermal Section at 800° C.

[0314]FIG. 51 presents an isothermal section at 800° C. Like in FIG. 50, shaded fields indicate the regions of homogeneous ternary phases (γ_(T), δ_(R), δ_(R), and α). The 800° C. section lies below many critical tie lines and transition planes. Therefore, FIG. 51 features numerous three-phase equilibria.

[0315] At 800° C. the system features three two-phase equilibria that involve the ternary α phase (CuInSe₂): L₁+α, L₃+α, and L₄+α. FIG. 51 also indicates the position of the transition plane U₁₉, which also occurs at 800° C. This transition plane belongs to the region IIIb (CuInSe₂—Se—Cu₂Se) of subsystem III and borders immediately to the two-phase space α+(Cu, In)₂Se_(H). The three-phase spaces L₃+L₄+α and L₃+δ_(H)+α come into existence via the transition plane U₁₈ (L₄+δ_(H)⇄α+L₃) and via the metatectic critical tie line T_(k15) (δ_(H)⇄α+L₄). As we have described in Part II, the two-phase space L₁+α comes about by the metatectic critical tie line T_(k11) at 812° C. The two three-phase spaces L₁+δ_(H)+α, which start to exist below 812° C. and the intersection with the two-phase space L₁+α belong to subsystem II (In—In₂Se₃—Cu₂Se—Cu).

[0316] The three-phase equilibria L+δ_(H)+δ_(R) and L+γ_(T)+δ_(R) which form via the critical tie lines T_(k4) (910° C.) and T_(k5) (900° C.) and both occur two times each, extend towards the Se-rich and In-rich side of the composition triangle into the region IIIa (In₂Se₃—Se—CuInSe₂) of subsystem III and into subsystem II (In—In₂Se₃—Cu₂Se—Cu).

[0317] In the region of In₂Se₃ we observe two three-phase spaces: β-In₂Se₃+δ-In₂Se₃+γ_(T) and L₃+δ₁+γ_(T) (note that in FIG. 51 the symbols β₁ and δ₁ are shortcuts for β-In₂Se₃ and δ-In₂Se₃). These three-phase spaces originate from the critical tie line at T_(k6) (part I, part II). The Se-rich side of FIG. 51 further indicates a narrow region of liquid phase L₃ or L₄, respectively parallel to the In—Se boundary system. Apart from small shifts, the phase equilibria within subsystem II (In—In₂Se₃—Cu₂Se—Cu) are the same as in FIG. 50.

[0318] 3.3 Isothermal Section at 500° C.

[0319] The isothermal section at 500° C. is of major technical importance for the fabrication of thin films for photovoltaic devices because these films are often deposited at temperatures around 500° C. This Example extends our discussion of the isothermal section at 500° C. from Cu-rich and In-rich alloys (Parts I and II) to Se-rich alloys: FIG. 52 presents the isothermal section at 500° C. over the entire composition triangle. FIG. 52b corresponds to the region we have presented in Part I, covering compositions from 15 to 38 at. % Cu and from 44 to 60 at. % Se. The dotted line in this diagram marks the composition Cu₂₅In₂₅Se₅₀, and the hatched line marks the position of the In₂Se₃—Cu₂Se quasibinary section. Note that th legend of FIG. 52 introduces a few shortcuts for ternary phases and indium selenides.

[0320] In the Se-rich corner and in the In-rich corner the isothermal section at 500° C. still features small regions of liquid phase (L₄ and L₂, respectively). The four three-phase equilibria L₄+γ-In₂Se₃+γ_(T), L₄+δ_(R)+γ_(T), L₄+δ_(R)+α, and L₄+α+Cu₂Se_(H) on the Se-rich side result from U₂₃, T_(k5), U₂₂, and from the reaction mo_(T3). The development of these three-phase spaces towards lower temperatures becomes obvious from the isopleths of FIGS. 46 and 47.

[0321] The α phase (CuInSe₂) establishes equilibria with eight solid phases and one liquid phase (L₄). Among the solid phases, η, δ, and α_(Cu) originate from the In—Cu boundary system, Cu₂Se_(H) from the Cu—Se boundary system, and InSe and In₄Se₃ from the In—Se boundary system. The remaining two phases in equilibrium with a are δ_(R) and δ_(H). The morphology of the α phase field at higher and lower temperatures can be assessed from the In₂Se₃—Cu₂Se isopleth in Part I and from the numerous other isopleths we have presented in Parts II and III, the present publication.

4. Phase Equilibria with 10 at. % In

[0322] With FIG. 30 and FIG. 31 we have already shown two isopleths that connect the phase equilibria of the three different subsystems. FIG. 53 presents another isopleth of this kind, linking the equilibria of subsystem II (In—In₂Se₃—Cu₂Se—Cu) with those of region IIIa (In₂Se₃—Se—CuInSe₂) and region IIIb (Cu₂Se—Se—CuInSe₂) of subsystem III (In₂Se₃—Se—Cu₂Se). The equilibria of subsystem I, the In₂Se₃—Cu₂Se quasibinary section, appear below the intersection with the maximum L+δ_(H) and below the intersection with the critical tie line at T_(k4) (91° C.) in FIG. 53. Starting from the Cu—In boundary system at Cu₁₀In₉₀ and increasing the Se content from 0 to 55 at. % Se, the isopleth first intersects with the miscibility gap L₁+L₂, then with the ternary monotectic four-phase plane mo_(T2), and finally with the four-phase planes U₉, U₁₁, U₁₂, U₁₃, U₁₄, U₁₅, U₁₆, and E_(T2). Furthermore, FIG. 53 shows that the two three-phase spaces L₄+δ_(H)+α, which emerge from the critical tie line T_(k15) (805° C.) on the Se-rich side of the isopleth, terminate at the transition planes U₂₂ (770° C.) and U₁₈ (803° C.). The non-variant equilibria reaching from 80 at. % Se almost to the Cu—Se boundary system belong to the ternary monotectic four-phase plane mo_(T3) at 522° C. and to the transition planes U₂₀ at 376° C. and U₂₁ at 338° C. The temperatures of the intersections with the ternary eutectica E_(T4) and E_(T3) and with the transition plane U₂₄ are very close to each other according to Table 3 they differ by only 1 K.

[0323] The symbol e_(Tsol4) denotes a four-phase plane at 400° C. between 50.0 and 52.5 at. % Se. This four-phase plane corresponds to ternary eutectic reaction by which the phase δ_(H) decomposes into δ_(R)+InSe+α (Table 1). This result was obtained by analyzing specimens that were tempered for 30 d immediately below 400° C. In these specimens the phase δ_(H) was no longer observed.

5. Conclusion

[0324] Experimental research on the phase equilibria of alloys still plays a key role for the development of new technologies because this kind of research provides physical insight in the causal correlations between phase equilibria, evolution of microstructures, and the macroscopic properties of materials. The phase diagram of Cu—In—Se, which we have described in the three subsequent Examples, exhibits a large variety of four-phase reactions and critical tie lines. This rather complicated system required a thorough investigation of many different alloys in order to deduce the liquidus isotherms, the tie lines and the partitioning of the liquidus. Our results are based on experimental studies by differential thermal analysis, light-optical microscopy, scanning electron microscopy, transmission electron microscopy, and x-ray diffraction. In total, we have identifi d four different ternary phases: α (CuInSe₂), γ_(T) (CuIn₅Se₈), H_(T) (Cu₁₃In₃8e₁₁), and δ_(H/R) (CuIn₃Se₅). Among these, H_(T) and δ_(H) are high-temperature phases, which cannot be stabilized at room temperature by quenching in water.

[0325] In the framework of our study it was necessary to re-investigate the phase equilibria of all three binary boundary systems of Cu—In—Se, particularly for the In—Se boundary system. These studies resulted in re-determination of the miscibility gaps between the In-rich and Se-rich liquid phases of the In—Se boundary system and the miscibility gap on the Se-rich side of the Cu—Se boundary system. Moreover, those initial studies led to the discovery of two new phases in the In—Se boundary system and yielded a diagram of metastable states. Among the indium selenides, InSe and In₄Se₃ establish two-phase and three-phase equilibria with the α phase (CuInSe₂).

[0326] In the composition range of the phase InSe and in ternary alloys we also observed the formation of metastable equilibria during cooling down from the liquid state. In the composition range of the α phase and along the In₂Se₃—Cu₂Se quasibinary section we have set up a diagram of supercooled equilibria. This diagram proved to be helpful in interpreting the results of TEM studies on the microstructure of thin film solar cells. Comparison between thin films and equilibrated polycrystalline bulk material revealed that the room temperature state of the thin films corresponds the equilibrium state of the bulk material at elevated temperatures. The large composition range that the α phase (CuInSe₂) exhibits at higher temperatures can be quenched-in to room temperature. Maximum extension of the composition range can be achieved with alloys within the In₂Se₃—Cu₂Se quasibinary section by annealing above the δ_(H)→α phase transformation and quenching in water. According to experimental results of Beilharz et al. (“Bulk crystals in the system Cu—In—Ga—Se with initial Ga/Ga+In=0.1 to 0.3: growth from the melt and characterization”, in Ternary and Multinary Components, Institute of Physics Publishing, Bristol UK (1998, 19-22), it is also possible to extend the composition range of the α phase by alloying with Ga. A similar effect has been observed for Na additions. Therefore, it appears reasonable to extend our studies on the phase equilibria of Cu—In—Se to the quaternary systems Cu—In—Se—Ga and Cu—In—Se—Na. Preliminary experiments with polycrystalline specimens of the α phase have shown that alloying with 0.1 to 0.2 at. % Na extends the range of homogeneous a by about 2 at. % Cu towards the In₂Se₃ side of the In₂Se₃—Cu₂Se quasibinary section.

[0327] From the isothermal sections we have presented in Parts II and III it becomes clear that at 500° C. the α phase establishes two-phase and three-phase equilibria with nine different phases. This variety of equilibria explains the difficulties other researchers have encountered when attempting to grow CuInSe₂ single crystals. Within the In₂Se₃—Cu₂Se quasibinary section the α phase (CuInSe₂) can only form via the δ_(H)→α transformation. Therefore, our finding that the α phase possesses four different surfaces of primary crystallization (α_(L1) through α_(L4)) is of major importance for the development of new strategies to grow CuInSe₂ single crystals. According to the Cu—In—Se phase diagram it is possible to grow single crystals of the α phase within a certain range of different compositions around the stoichiometric composition CuInSe₂. For this purpose, one first needs to grow single crystals of δ_(H) with the desired composition and then transform these to α. This is not possible, however, with the Bridgman technique: Since this technique requires congruent solidification, one can only obtain δ_(H) single crystals with the composition Cu_(23.5)In_(26.0)Se_(50.5), and on transforming to α and cooling down to room temperature such single crystals decompose into two phases (Part I). In order to grow α single crystals and to be able to control their composition, therefore, one should not employ the Bridgman technique but the Czochralski method, which works with a large reservoir of liquid phase.

TABLE 4 Primary surfaces a_(L1) 1. U₁₃(597° C., Cu_(1.0)In_(51.0)Se_(48.0)) 2. U₁₄(530° C., Cu_(3.6)In_(58.4)Se_(38.0)) 3. mo_(T2)(512° C., Cu_(5.6)In_(61.8)Se_(32.6)) 4. Tk₁₂ (673° C., Cu_(39.8)In_(26.6)Se_(33.6)) 5. moT1 (653° C., Cu_(49.0)In_(33.1)Se_(17.9)) 6. U3 (795° C., Cu_(47.2)In_(16.2)Se_(37.6)) 7. T_(k11)(812° C., Cu_(29.3)In_(29.7)Se_(41.0)) Primary surface a_(L2) 1. mo_(T2)(L2) (512° C., Cu_(10.0)In_(85.0)Se_(5.0)) 2. U15 (506° C., Cu_(9.2)In_(86.7)Se_(4.1)) 3. T_(k13)(L2) (663° C., Cu_(63.5)In_(30.0)Se_(6.5)) 4. U7 (652° C., Cu_(70.3)In_(23.8)Se_(5.9)) 5. E_(T1) (620° C., Cu_(71.5)In_(22.7)Se_(5.8)) 6. mo_(T1)(L2) (653° C., Cu_(72.0)In_(21.2)Se_(6.8)) 7. T_(k12)(L2) (673° C., Cu_(62.0)In_(30.0)Se_(8.0)) Primary surface a_(L3) 1. U18 (L3) (803° C., Cu_(41.9)In_(7.9)Se_(50.2)) 2. U19 (800° C., Cu_(46.5)In_(6.4)Se_(47.1)) 3. mo_(T3)(L3) (552° C., Cu_(49.0)In_(0.5)Se_(50.5)) Primary surface a_(L4) 1. T_(k15) (805° C., Cu_(8.5)In_(8.5)Se_(83.0)) 2. U₁₈(L4) (803° C., Cu_(8.4)In_(6.1)Se_(85.5)) 3. U₂₂ (770° C., Cu_(2.7)In_(8.3)Se_(89.0)) 4. T_(k17 (221° C.)) 5. U24 (220° C.) 6. E_(T3) (220° C., Se_(99.9)) 

1. Use of the phase diagram Cu—In—Se including the liquidus surface of the system for the preparation of solid compositions comprising the elements Cu, In and Se.
 2. The use of claim 1 wherein the preparation comprises the direct formation of a desired solid composition from a liquid phase.
 3. The use of claim 1 or 2 wherein said preparation comprises a crystallization from a liquid phase.
 4. The use of claim 3 wherein said preparation comprises crystal growth by the Czochralski method without feed of a liquid phase.
 5. The use of claim 3 wherein said preparation comprises crystal growth by the Czochralski method including feed of a liquid phase.
 6. The use of claim 3 wherein said preparation comprises crystal growth from a first liquid phase which is in contact with a second liquid phase-wherein the density and the stoichiometry of the first liquid phase are different from the second liquid phase.
 7. The use of any one of claims 2-6 wherein the desired solid composition has a stoichiometry which differs from the stoichiometry of the liquid phase from which it is formed.
 8. The use of any one of claims 1-7 wherein said compositions are single-phase compositions.
 9. The use of any one of claims 1-8 wherein said compositions are single crystalline compositions.
 10. The use of any one of claims 1-9 wherein said compositions include Cu, In, Se and at least one further element.
 11. The use of claim 10 wherein said at least one further element is present in an amount of up to 5 atom percent based on the total composition.
 12. The use of claim 10 or 11 wherein said at least one further element is selected from the group Ga, Na, S.
 13. The use of any one of claims 1-12 wherein said compositions are selected from the α-phase, the 5_(T)-phase, the δ_(R)-phase and the δ_(H)-phase.
 14. The use of claim 13 wherein said composition is the α-phase having the stoichiometry CuInSe₂ within a compositional range as indicated in FIGS. 51 and 52 and optionally extended by the presence of further elements.
 15. The use of claim 14 wherein the α-phase is directly crystallized from a liquid phase selected from the group of liquidus surfaces of primary crystallization αL1, αL2, αL3 and αL4 as defined in the phase diagram and in Table
 4. 16. A method for directly obtaining the Cu—In—Se α-phase from a liquid phase by crystal growth from the group of liquidus surfaces of primary crystallization αL1, αL2, αL3 and αL4 as defined in the phase diagram and in Table
 4. 17. The method of claim 16 wherein the α-phase is obtained as a single-phase composition.
 18. The method of claim 16 or 17 wherein the α-phase is obtained as a single crystal.
 19. The method of any one of claims 16-18 wherein the α-phase is grown on a substrate.
 20. A single-phase Cu—In—Se composition selected from the α-phase, the γ_(T)-phase, the δ_(R)-phase and the δ_(H)-phase.
 21. The composition of claim 20 which is the α-phase having the stoichiometry CuInSe₂ within a compositional range as indicated in FIGS. 51 and 52 and optionally extended by the presence of further elements.
 22. The composition of claim 20 or 21 having a defect concentration which is about the corresponding equilibrium concentration.
 23. The composition of any one of claims 20-22 which is a single crystal. 